I. Sohn, H. Choi, Y. Noh, J. Kim, and M. S. Ahsan, “Laser assisted fabrication of micro-lens array and characterization of their beam shaping property,” Appl. Surf. Sci. 479(15), 375–385 (2019).
[Crossref]

K. Kawahara, T Kikuchi, S. Natsui, and R. O. Suzuki, “Fabrication of ordered submicrometer-scale convex lens array via nanoimprint lithography using an anodized aluminum mold,” Microelectron. Eng. 185-186(5), 61–68 (2018).
[Crossref]

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

Y. K. Kim, J. H. Ju, and S. M. Kim, “Replication of a glass microlens array using a vitreous carbon mold,” Opt. Express 26(12), 14936–14944 (2018).
[Crossref]

C. Chang and J. Chu, “Innovative design of reel-to-reel hot embossing system for production of plastic microlens array films,” Int. J. Adv. Des. Manuf. Technol. 89(5-8), 2411–2420 (2017).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

W. Choi, R. Shin, J. Lim, and S. Kang, “Design methodology for a confocal imaging system using an objective microlens array with an increased working distance,” Sci. Rep. 6(1), 33278 (2016).
[Crossref]

C. Liu and G. J. Su, “Enhanced light extraction from UV LEDs using spin-on glass microlenses,” J. Micromech. Microeng. 26(5), 055003 (2016).
[Crossref]

K. Pang, L. Song, F. Fang, Y. Zhang, and H. Zhang, “An imaging system with a large depth of field based on an overlapped micro-lens array,” CIRP Ann. 65(1), 471–474 (2016).
[Crossref]

M. Chakrabarti, C. Dam-Hansen, J. Stubager, T. F. Pedersen, and H. C. Pedersen, “Replication of optical microlens array using photoresist coated molds,” Opt. Express 24(9), 9528–9540 (2016).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

J. Chen, J. Cheng, D. Zhang, and S. Chen, “Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces,” Precis. Eng. 44, 70–74 (2016).
[Crossref]

J. Chen, C. Gu, H. Lin, and S. Chen, “Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces,” Opt. Express 23(16), 20977–20985 (2015).
[Crossref]

C. Chang and M. Tsai, “Development of a continuous roll-to-roll processing system for mass production of plastic optical film,” J. Micromech. Microeng. 25(12), 125014 (2015).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

Y. Lee, C. Yu, and J. Kim, “Polarizer-free liquid crystal display with double microlens array layers and polarization-controlling liquid crystal layer,” Opt. Express 23(21), 27627–27632 (2015).
[Crossref]

P. Li, J. Xie, J. Cheng, and Y. N. Jiang, “Study on weak-light photovoltaic characteristics of solar cell with a microgroove lens array on glass substrate,” Opt. Express 23(7), A192–A203 (2015).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

J. M. Pavia, M. Wolf, and E. Charbon, “Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery,” Opt. Express 22(4), 4202–4213 (2014).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

F. Galeotti, W. Mróz, G. Scavia, and C. Botta, “Microlens arrays for light extraction enhancement in organic light-emitting diodes: A facile approach,” Org. Electron. 14(1), 212–218 (2013).
[Crossref]

N. G. Sultanova, S. N. Kasarova, and I. D. Nikolov, “Characterization of optical properties of optical polymers,” Opt. Quantum Electron. 45(3), 221–232 (2013).
[Crossref]

C. Huang, W. Hsiao, K. Huang, K. Chang, H. Chou, and C. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromech. Microeng. 21(8), 085020 (2011).
[Crossref]

D. Nieto, M. T. Flores-Arias, G. M. O’Connor, and C. Gomez-Reino, “Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd: YVO 4 laser,” Appl. Opt. 49(26), 4979–4983 (2010).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

S. D. Zilio, G. D. Giustina, G. Brusatin, and M. Tormen, “Microlens arrays on large area UV transparent hybrid sol–gel materials for optical tools,” Microelectron. Eng. 87(5-8), 1143–1146 (2010).
[Crossref]

Y. Chen, Y. Y. Allen, D. Yao, F. Klocke, and G. Pongs, “A reflow process for glass microlens array fabrication by use of precision compression molding,” J. Micromech. Microeng. 18(5), 055022 (2008).
[Crossref]

H. Mekaru, T. Tsuchida, J. Uegaki, M. Yasui, M. Yamashita, and M. Takahashi, “Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold,” Microelectron. Eng. 85(5-6), 873–876 (2008).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3-4), 339–342 (2006).
[Crossref]

K. W. Ro, K. Lim, B. C. Shim, and J. H. Hahn, “Integrated Light Collimating System for Extended Optical-Path-Length Absorbance Detection in Microchip-Based Capillary Electrophoresis,” Anal. Chem. 77(16), 5160–5166 (2005).
[Crossref]

G. C. Firestone and A. Y. Yi, “Precision compression molding of glass microlenses and microlens arrays—an experimental study,” Appl. Opt. 44(29), 6115–6122 (2005).
[Crossref]

X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, “Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass,” Appl. Phys. Lett. 86(11), 114102 (2005).
[Crossref]

M. He, X.-C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, “Simple reflow technique for fabrication of a microlens array in solgel glass,” Opt. Lett. 28(9), 731–733 (2003).
[Crossref]

I. Sohn, H. Choi, Y. Noh, J. Kim, and M. S. Ahsan, “Laser assisted fabrication of micro-lens array and characterization of their beam shaping property,” Appl. Surf. Sci. 479(15), 375–385 (2019).
[Crossref]

Y. Chen, Y. Y. Allen, D. Yao, F. Klocke, and G. Pongs, “A reflow process for glass microlens array fabrication by use of precision compression molding,” J. Micromech. Microeng. 18(5), 055022 (2008).
[Crossref]

O. Homburg, A. Bayer, T. Mitra, J. Meinschien, and L. Aschke, “Beam shaping of high power diode lasers benefits from asymmetrical refractive micro-lens arrays,” International Society for Optics and Photonics In High-Power Diode Laser Technology and Applications VI (6876), 68760B International Society for Optics and Photonics (2008).

K. Kiedrowski, J. Thiem, F. Jakobs, J. Kielhorn, I. Balasa, D. Kracht, and D. Ristau, “Determination of the laser-induced damage threshold of polymer optical fibers,” In Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 10805, 108052C International Society for Optics and Photonics (2018).

O. Homburg, A. Bayer, T. Mitra, J. Meinschien, and L. Aschke, “Beam shaping of high power diode lasers benefits from asymmetrical refractive micro-lens arrays,” International Society for Optics and Photonics In High-Power Diode Laser Technology and Applications VI (6876), 68760B International Society for Optics and Photonics (2008).

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

F. Galeotti, W. Mróz, G. Scavia, and C. Botta, “Microlens arrays for light extraction enhancement in organic light-emitting diodes: A facile approach,” Org. Electron. 14(1), 212–218 (2013).
[Crossref]

S. D. Zilio, G. D. Giustina, G. Brusatin, and M. Tormen, “Microlens arrays on large area UV transparent hybrid sol–gel materials for optical tools,” Microelectron. Eng. 87(5-8), 1143–1146 (2010).
[Crossref]

X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, “Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass,” Appl. Phys. Lett. 86(11), 114102 (2005).
[Crossref]

M. He, X.-C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, “Simple reflow technique for fabrication of a microlens array in solgel glass,” Opt. Lett. 28(9), 731–733 (2003).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

M. Chakrabarti, C. Dam-Hansen, J. Stubager, T. F. Pedersen, and H. C. Pedersen, “Replication of optical microlens array using photoresist coated molds,” Opt. Express 24(9), 9528–9540 (2016).
[Crossref]

C. Chang and J. Chu, “Innovative design of reel-to-reel hot embossing system for production of plastic microlens array films,” Int. J. Adv. Des. Manuf. Technol. 89(5-8), 2411–2420 (2017).
[Crossref]

C. Chang and M. Tsai, “Development of a continuous roll-to-roll processing system for mass production of plastic optical film,” J. Micromech. Microeng. 25(12), 125014 (2015).
[Crossref]

C. Huang, W. Hsiao, K. Huang, K. Chang, H. Chou, and C. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromech. Microeng. 21(8), 085020 (2011).
[Crossref]

J. M. Pavia, M. Wolf, and E. Charbon, “Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery,” Opt. Express 22(4), 4202–4213 (2014).
[Crossref]

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

J. Chen, J. Cheng, D. Zhang, and S. Chen, “Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces,” Precis. Eng. 44, 70–74 (2016).
[Crossref]

J. Chen, C. Gu, H. Lin, and S. Chen, “Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces,” Opt. Express 23(16), 20977–20985 (2015).
[Crossref]

J. Chen, J. Cheng, D. Zhang, and S. Chen, “Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces,” Precis. Eng. 44, 70–74 (2016).
[Crossref]

J. Chen, C. Gu, H. Lin, and S. Chen, “Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces,” Opt. Express 23(16), 20977–20985 (2015).
[Crossref]

Y. Chen, Y. Y. Allen, D. Yao, F. Klocke, and G. Pongs, “A reflow process for glass microlens array fabrication by use of precision compression molding,” J. Micromech. Microeng. 18(5), 055022 (2008).
[Crossref]

J. Chen, J. Cheng, D. Zhang, and S. Chen, “Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces,” Precis. Eng. 44, 70–74 (2016).
[Crossref]

P. Li, J. Xie, J. Cheng, and Y. N. Jiang, “Study on weak-light photovoltaic characteristics of solar cell with a microgroove lens array on glass substrate,” Opt. Express 23(7), A192–A203 (2015).
[Crossref]

X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, “Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass,” Appl. Phys. Lett. 86(11), 114102 (2005).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3-4), 339–342 (2006).
[Crossref]

I. Sohn, H. Choi, Y. Noh, J. Kim, and M. S. Ahsan, “Laser assisted fabrication of micro-lens array and characterization of their beam shaping property,” Appl. Surf. Sci. 479(15), 375–385 (2019).
[Crossref]

W. Choi, R. Shin, J. Lim, and S. Kang, “Design methodology for a confocal imaging system using an objective microlens array with an increased working distance,” Sci. Rep. 6(1), 33278 (2016).
[Crossref]

C. Huang, W. Hsiao, K. Huang, K. Chang, H. Chou, and C. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromech. Microeng. 21(8), 085020 (2011).
[Crossref]

C. Huang, W. Hsiao, K. Huang, K. Chang, H. Chou, and C. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromech. Microeng. 21(8), 085020 (2011).
[Crossref]

C. Chang and J. Chu, “Innovative design of reel-to-reel hot embossing system for production of plastic microlens array films,” Int. J. Adv. Des. Manuf. Technol. 89(5-8), 2411–2420 (2017).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

M. Chakrabarti, C. Dam-Hansen, J. Stubager, T. F. Pedersen, and H. C. Pedersen, “Replication of optical microlens array using photoresist coated molds,” Opt. Express 24(9), 9528–9540 (2016).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

K. Pang, L. Song, F. Fang, Y. Zhang, and H. Zhang, “An imaging system with a large depth of field based on an overlapped micro-lens array,” CIRP Ann. 65(1), 471–474 (2016).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

G. C. Firestone and A. Y. Yi, “Precision compression molding of glass microlenses and microlens arrays—an experimental study,” Appl. Opt. 44(29), 6115–6122 (2005).
[Crossref]

D. Nieto, M. T. Flores-Arias, G. M. O’Connor, and C. Gomez-Reino, “Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd: YVO 4 laser,” Appl. Opt. 49(26), 4979–4983 (2010).
[Crossref]

F. Galeotti, W. Mróz, G. Scavia, and C. Botta, “Microlens arrays for light extraction enhancement in organic light-emitting diodes: A facile approach,” Org. Electron. 14(1), 212–218 (2013).
[Crossref]

S. D. Zilio, G. D. Giustina, G. Brusatin, and M. Tormen, “Microlens arrays on large area UV transparent hybrid sol–gel materials for optical tools,” Microelectron. Eng. 87(5-8), 1143–1146 (2010).
[Crossref]

D. Nieto, M. T. Flores-Arias, G. M. O’Connor, and C. Gomez-Reino, “Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd: YVO 4 laser,” Appl. Opt. 49(26), 4979–4983 (2010).
[Crossref]

J. Chen, C. Gu, H. Lin, and S. Chen, “Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces,” Opt. Express 23(16), 20977–20985 (2015).
[Crossref]

K. W. Ro, K. Lim, B. C. Shim, and J. H. Hahn, “Integrated Light Collimating System for Extended Optical-Path-Length Absorbance Detection in Microchip-Based Capillary Electrophoresis,” Anal. Chem. 77(16), 5160–5166 (2005).
[Crossref]

X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, “Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass,” Appl. Phys. Lett. 86(11), 114102 (2005).
[Crossref]

M. He, X.-C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, “Simple reflow technique for fabrication of a microlens array in solgel glass,” Opt. Lett. 28(9), 731–733 (2003).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

O. Homburg, A. Bayer, T. Mitra, J. Meinschien, and L. Aschke, “Beam shaping of high power diode lasers benefits from asymmetrical refractive micro-lens arrays,” International Society for Optics and Photonics In High-Power Diode Laser Technology and Applications VI (6876), 68760B International Society for Optics and Photonics (2008).

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

C. Huang, W. Hsiao, K. Huang, K. Chang, H. Chou, and C. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromech. Microeng. 21(8), 085020 (2011).
[Crossref]

C. Huang, W. Hsiao, K. Huang, K. Chang, H. Chou, and C. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromech. Microeng. 21(8), 085020 (2011).
[Crossref]

C. Huang, W. Hsiao, K. Huang, K. Chang, H. Chou, and C. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromech. Microeng. 21(8), 085020 (2011).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

K. Kiedrowski, J. Thiem, F. Jakobs, J. Kielhorn, I. Balasa, D. Kracht, and D. Ristau, “Determination of the laser-induced damage threshold of polymer optical fibers,” In Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 10805, 108052C International Society for Optics and Photonics (2018).

P. Li, J. Xie, J. Cheng, and Y. N. Jiang, “Study on weak-light photovoltaic characteristics of solar cell with a microgroove lens array on glass substrate,” Opt. Express 23(7), A192–A203 (2015).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3-4), 339–342 (2006).
[Crossref]

Y. K. Kim, J. H. Ju, and S. M. Kim, “Replication of a glass microlens array using a vitreous carbon mold,” Opt. Express 26(12), 14936–14944 (2018).
[Crossref]

W. Choi, R. Shin, J. Lim, and S. Kang, “Design methodology for a confocal imaging system using an objective microlens array with an increased working distance,” Sci. Rep. 6(1), 33278 (2016).
[Crossref]

N. G. Sultanova, S. N. Kasarova, and I. D. Nikolov, “Characterization of optical properties of optical polymers,” Opt. Quantum Electron. 45(3), 221–232 (2013).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

K. Kawahara, T Kikuchi, S. Natsui, and R. O. Suzuki, “Fabrication of ordered submicrometer-scale convex lens array via nanoimprint lithography using an anodized aluminum mold,” Microelectron. Eng. 185-186(5), 61–68 (2018).
[Crossref]

K. Kiedrowski, J. Thiem, F. Jakobs, J. Kielhorn, I. Balasa, D. Kracht, and D. Ristau, “Determination of the laser-induced damage threshold of polymer optical fibers,” In Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 10805, 108052C International Society for Optics and Photonics (2018).

K. Kiedrowski, J. Thiem, F. Jakobs, J. Kielhorn, I. Balasa, D. Kracht, and D. Ristau, “Determination of the laser-induced damage threshold of polymer optical fibers,” In Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 10805, 108052C International Society for Optics and Photonics (2018).

K. Kawahara, T Kikuchi, S. Natsui, and R. O. Suzuki, “Fabrication of ordered submicrometer-scale convex lens array via nanoimprint lithography using an anodized aluminum mold,” Microelectron. Eng. 185-186(5), 61–68 (2018).
[Crossref]

I. Sohn, H. Choi, Y. Noh, J. Kim, and M. S. Ahsan, “Laser assisted fabrication of micro-lens array and characterization of their beam shaping property,” Appl. Surf. Sci. 479(15), 375–385 (2019).
[Crossref]

Y. Lee, C. Yu, and J. Kim, “Polarizer-free liquid crystal display with double microlens array layers and polarization-controlling liquid crystal layer,” Opt. Express 23(21), 27627–27632 (2015).
[Crossref]

Y. K. Kim, J. H. Ju, and S. M. Kim, “Replication of a glass microlens array using a vitreous carbon mold,” Opt. Express 26(12), 14936–14944 (2018).
[Crossref]

Y. K. Kim, J. H. Ju, and S. M. Kim, “Replication of a glass microlens array using a vitreous carbon mold,” Opt. Express 26(12), 14936–14944 (2018).
[Crossref]

Y. Chen, Y. Y. Allen, D. Yao, F. Klocke, and G. Pongs, “A reflow process for glass microlens array fabrication by use of precision compression molding,” J. Micromech. Microeng. 18(5), 055022 (2008).
[Crossref]

K. Kiedrowski, J. Thiem, F. Jakobs, J. Kielhorn, I. Balasa, D. Kracht, and D. Ristau, “Determination of the laser-induced damage threshold of polymer optical fibers,” In Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 10805, 108052C International Society for Optics and Photonics (2018).

M. He, X.-C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, “Simple reflow technique for fabrication of a microlens array in solgel glass,” Opt. Lett. 28(9), 731–733 (2003).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3-4), 339–342 (2006).
[Crossref]

Y. Lee, C. Yu, and J. Kim, “Polarizer-free liquid crystal display with double microlens array layers and polarization-controlling liquid crystal layer,” Opt. Express 23(21), 27627–27632 (2015).
[Crossref]

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

P. Li, J. Xie, J. Cheng, and Y. N. Jiang, “Study on weak-light photovoltaic characteristics of solar cell with a microgroove lens array on glass substrate,” Opt. Express 23(7), A192–A203 (2015).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

W. Choi, R. Shin, J. Lim, and S. Kang, “Design methodology for a confocal imaging system using an objective microlens array with an increased working distance,” Sci. Rep. 6(1), 33278 (2016).
[Crossref]

K. W. Ro, K. Lim, B. C. Shim, and J. H. Hahn, “Integrated Light Collimating System for Extended Optical-Path-Length Absorbance Detection in Microchip-Based Capillary Electrophoresis,” Anal. Chem. 77(16), 5160–5166 (2005).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

J. Chen, C. Gu, H. Lin, and S. Chen, “Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces,” Opt. Express 23(16), 20977–20985 (2015).
[Crossref]

C. Liu and G. J. Su, “Enhanced light extraction from UV LEDs using spin-on glass microlenses,” J. Micromech. Microeng. 26(5), 055003 (2016).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3-4), 339–342 (2006).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

O. Homburg, A. Bayer, T. Mitra, J. Meinschien, and L. Aschke, “Beam shaping of high power diode lasers benefits from asymmetrical refractive micro-lens arrays,” International Society for Optics and Photonics In High-Power Diode Laser Technology and Applications VI (6876), 68760B International Society for Optics and Photonics (2008).

H. Mekaru, T. Tsuchida, J. Uegaki, M. Yasui, M. Yamashita, and M. Takahashi, “Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold,” Microelectron. Eng. 85(5-6), 873–876 (2008).
[Crossref]

O. Homburg, A. Bayer, T. Mitra, J. Meinschien, and L. Aschke, “Beam shaping of high power diode lasers benefits from asymmetrical refractive micro-lens arrays,” International Society for Optics and Photonics In High-Power Diode Laser Technology and Applications VI (6876), 68760B International Society for Optics and Photonics (2008).

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

F. Galeotti, W. Mróz, G. Scavia, and C. Botta, “Microlens arrays for light extraction enhancement in organic light-emitting diodes: A facile approach,” Org. Electron. 14(1), 212–218 (2013).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

K. Kawahara, T Kikuchi, S. Natsui, and R. O. Suzuki, “Fabrication of ordered submicrometer-scale convex lens array via nanoimprint lithography using an anodized aluminum mold,” Microelectron. Eng. 185-186(5), 61–68 (2018).
[Crossref]

M. He, X.-C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, “Simple reflow technique for fabrication of a microlens array in solgel glass,” Opt. Lett. 28(9), 731–733 (2003).
[Crossref]

D. Nieto, M. T. Flores-Arias, G. M. O’Connor, and C. Gomez-Reino, “Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd: YVO 4 laser,” Appl. Opt. 49(26), 4979–4983 (2010).
[Crossref]

N. G. Sultanova, S. N. Kasarova, and I. D. Nikolov, “Characterization of optical properties of optical polymers,” Opt. Quantum Electron. 45(3), 221–232 (2013).
[Crossref]

X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, “Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass,” Appl. Phys. Lett. 86(11), 114102 (2005).
[Crossref]

I. Sohn, H. Choi, Y. Noh, J. Kim, and M. S. Ahsan, “Laser assisted fabrication of micro-lens array and characterization of their beam shaping property,” Appl. Surf. Sci. 479(15), 375–385 (2019).
[Crossref]

D. Nieto, M. T. Flores-Arias, G. M. O’Connor, and C. Gomez-Reino, “Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd: YVO 4 laser,” Appl. Opt. 49(26), 4979–4983 (2010).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

K. Pang, L. Song, F. Fang, Y. Zhang, and H. Zhang, “An imaging system with a large depth of field based on an overlapped micro-lens array,” CIRP Ann. 65(1), 471–474 (2016).
[Crossref]

J. M. Pavia, M. Wolf, and E. Charbon, “Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery,” Opt. Express 22(4), 4202–4213 (2014).
[Crossref]

M. Chakrabarti, C. Dam-Hansen, J. Stubager, T. F. Pedersen, and H. C. Pedersen, “Replication of optical microlens array using photoresist coated molds,” Opt. Express 24(9), 9528–9540 (2016).
[Crossref]

M. Chakrabarti, C. Dam-Hansen, J. Stubager, T. F. Pedersen, and H. C. Pedersen, “Replication of optical microlens array using photoresist coated molds,” Opt. Express 24(9), 9528–9540 (2016).
[Crossref]

X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, “Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass,” Appl. Phys. Lett. 86(11), 114102 (2005).
[Crossref]

Y. Chen, Y. Y. Allen, D. Yao, F. Klocke, and G. Pongs, “A reflow process for glass microlens array fabrication by use of precision compression molding,” J. Micromech. Microeng. 18(5), 055022 (2008).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

K. Kiedrowski, J. Thiem, F. Jakobs, J. Kielhorn, I. Balasa, D. Kracht, and D. Ristau, “Determination of the laser-induced damage threshold of polymer optical fibers,” In Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 10805, 108052C International Society for Optics and Photonics (2018).

K. W. Ro, K. Lim, B. C. Shim, and J. H. Hahn, “Integrated Light Collimating System for Extended Optical-Path-Length Absorbance Detection in Microchip-Based Capillary Electrophoresis,” Anal. Chem. 77(16), 5160–5166 (2005).
[Crossref]

F. Galeotti, W. Mróz, G. Scavia, and C. Botta, “Microlens arrays for light extraction enhancement in organic light-emitting diodes: A facile approach,” Org. Electron. 14(1), 212–218 (2013).
[Crossref]

K. W. Ro, K. Lim, B. C. Shim, and J. H. Hahn, “Integrated Light Collimating System for Extended Optical-Path-Length Absorbance Detection in Microchip-Based Capillary Electrophoresis,” Anal. Chem. 77(16), 5160–5166 (2005).
[Crossref]

W. Choi, R. Shin, J. Lim, and S. Kang, “Design methodology for a confocal imaging system using an objective microlens array with an increased working distance,” Sci. Rep. 6(1), 33278 (2016).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

I. Sohn, H. Choi, Y. Noh, J. Kim, and M. S. Ahsan, “Laser assisted fabrication of micro-lens array and characterization of their beam shaping property,” Appl. Surf. Sci. 479(15), 375–385 (2019).
[Crossref]

K. Pang, L. Song, F. Fang, Y. Zhang, and H. Zhang, “An imaging system with a large depth of field based on an overlapped micro-lens array,” CIRP Ann. 65(1), 471–474 (2016).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

M. Chakrabarti, C. Dam-Hansen, J. Stubager, T. F. Pedersen, and H. C. Pedersen, “Replication of optical microlens array using photoresist coated molds,” Opt. Express 24(9), 9528–9540 (2016).
[Crossref]

C. Liu and G. J. Su, “Enhanced light extraction from UV LEDs using spin-on glass microlenses,” J. Micromech. Microeng. 26(5), 055003 (2016).
[Crossref]

N. G. Sultanova, S. N. Kasarova, and I. D. Nikolov, “Characterization of optical properties of optical polymers,” Opt. Quantum Electron. 45(3), 221–232 (2013).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3-4), 339–342 (2006).
[Crossref]

K. Kawahara, T Kikuchi, S. Natsui, and R. O. Suzuki, “Fabrication of ordered submicrometer-scale convex lens array via nanoimprint lithography using an anodized aluminum mold,” Microelectron. Eng. 185-186(5), 61–68 (2018).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

H. Mekaru, T. Tsuchida, J. Uegaki, M. Yasui, M. Yamashita, and M. Takahashi, “Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold,” Microelectron. Eng. 85(5-6), 873–876 (2008).
[Crossref]

K. Kiedrowski, J. Thiem, F. Jakobs, J. Kielhorn, I. Balasa, D. Kracht, and D. Ristau, “Determination of the laser-induced damage threshold of polymer optical fibers,” In Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 10805, 108052C International Society for Optics and Photonics (2018).

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

S. D. Zilio, G. D. Giustina, G. Brusatin, and M. Tormen, “Microlens arrays on large area UV transparent hybrid sol–gel materials for optical tools,” Microelectron. Eng. 87(5-8), 1143–1146 (2010).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

C. Chang and M. Tsai, “Development of a continuous roll-to-roll processing system for mass production of plastic optical film,” J. Micromech. Microeng. 25(12), 125014 (2015).
[Crossref]

H. Mekaru, T. Tsuchida, J. Uegaki, M. Yasui, M. Yamashita, and M. Takahashi, “Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold,” Microelectron. Eng. 85(5-6), 873–876 (2008).
[Crossref]

H. Mekaru, T. Tsuchida, J. Uegaki, M. Yasui, M. Yamashita, and M. Takahashi, “Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold,” Microelectron. Eng. 85(5-6), 873–876 (2008).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

R. Kasztelanic, A. Filipkowski, D. Pysz, R. Stepien, A. J. Waddie, M. R. Taghizadeh, and R. Buczynski, “High resolution Shack-Hartmann sensor based on array of nanostructured GRIN lenses,” Opt. Express 25(3), 1680–1691 (2017).
[Crossref]

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

X. Huang, P. Wang, E. Lin, J. Jiao, X. Wang, Y. Li, Y. Hou, and Q. Zhao, “Fabrication of the glass microlens arrays and the collimating property on nanolaser,” Appl. Phys. A: Mater. Sci. Process. 122(7), 649 (2016).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

H. Xiong and Z. Wang, “Fabrication of Chalcogenide Microlens Array Using Hot Embossing Method,” in 2018 IEEE Sens. 1–3 (2018).

G. Intermite, A. McCarthy, R. E. Warburton, X. Ren, F. Villa, R. Lussana, A. J. Waddie, M. R. Taghizadeh, A. Tosi, F. Zappa, and G. S. Buller, “Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays,” Opt. Express 23(26), 33777–33791 (2015).
[Crossref]

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

J. M. Pavia, M. Wolf, and E. Charbon, “Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery,” Opt. Express 22(4), 4202–4213 (2014).
[Crossref]

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, “Comparing glass and plastic refractive microlenses fabricated with different technologies,” J. Opt. A: Pure Appl. Opt. 8(7), S407–S429 (2006).
[Crossref]

P. Li, J. Xie, J. Cheng, and Y. N. Jiang, “Study on weak-light photovoltaic characteristics of solar cell with a microgroove lens array on glass substrate,” Opt. Express 23(7), A192–A203 (2015).
[Crossref]

H. Xiong and Z. Wang, “Fabrication of Chalcogenide Microlens Array Using Hot Embossing Method,” in 2018 IEEE Sens. 1–3 (2018).

H. Mekaru, T. Tsuchida, J. Uegaki, M. Yasui, M. Yamashita, and M. Takahashi, “Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold,” Microelectron. Eng. 85(5-6), 873–876 (2008).
[Crossref]

Y. Wei, Q. Yang, H. Bian, F. Chen, M. Li, Y. Dai, and X. Hou, “Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems,” Appl. Surf. Sci. 457, 1202–1207 (2018).
[Crossref]

F. Chen, Z. Deng, Q. Yang, H. Bian, G. Du, J. Si, and X. Hou, “Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass,” Opt. Lett. 39(3), 606–609 (2014).
[Crossref]

S. Tong, H. Bian, Q. Yang, F. Chen, Z. Deng, J. Si, and X. Hou, “Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching,” Opt. Express 22(23), 29283–29291 (2014).
[Crossref]

F. Chen, H. Liu, Q. Yang, X. Wang, C. Hou, H. Bian, W. Liang, J. Si, and X. Hou, “Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method,” Opt. Express 18(19), 20334–20343 (2010).
[Crossref]

Y. Chen, Y. Y. Allen, D. Yao, F. Klocke, and G. Pongs, “A reflow process for glass microlens array fabrication by use of precision compression molding,” J. Micromech. Microeng. 18(5), 055022 (2008).
[Crossref]

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