Y. Nakata, Y. Matsuba, and N. Miyanaga, “Sub-micron period metal lattices fabricated by interfering ultraviolet femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 122(5), 532 (2016).
[Crossref]
F. Knorr, A. Uyttendaele, J. Stauch, F. Schechtel, Y. Reg, and M. Zimmermann, “Large-angle programmable direct laser interference patterning with ultrafast laser using spatial light modulator,” Phys. Proc. 83, 1170–1177 (2016).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
X. Jia and L. Dong, “Fabrication of complex micro/nanopatterns on semiconductors by the multi-beam interference of femtosecond laser,” Phys. Proc. 56, 1059–1065 (2014).
[Crossref]
J. Bekesi, P. Simon, and J. Ihlemann, “Deterministic sub-micron 2D grating structures on steel by UV-fs-laser interference patterning,” Appl. Phys., A Mater. Sci. Process. 114(1), 69–73 (2014).
[Crossref]
S. Indrisiunas, B. Voisiat, M. Gedvilas, and G. Raciukaitis, “Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation,” J. Micromech. Microeng. 23(9), 095034 (2013).
[Crossref]
J. Meinertz, T. Fricke-Begemann, and J. Ihlemann, “Micron and sub-micron gratings on glass by UV laser ablation,” Phys. Proc. 41, 701–705 (2013).
[Crossref]
D. Wang, Z. Wang, Z. Zhang, Y. Yue, D. Li, and C. Maple, “Effects of polarization on four-beam laser interference lithography,” Appl. Phys. Lett. 102(8), 081903 (2013).
[Crossref]
J. Bekesi, J. Meinertz, P. Simon, and J. Ihlemann, “Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation,” Appl. Phys., A Mater. Sci. Process. 110(1), 17–21 (2013).
[Crossref]
M. Steger, C. Hartmann, S. Beckemper, J. Holtkamp, and A. Gillner, “Fabrication of Hierarchical Structures by Direct Laser Writing and Multi-Beam-Interference,” J. Laser Micro Nanoeng. 8(3), 210–215 (2013).
[Crossref]
Y. Nakata, K. Murakawa, K. Sonoda, K. Momoo, N. Miyanaga, and T. Hiromoto, “Designing of interference pattern in ultra-short pulse laser processing,” Appl. Phys., A Mater. Sci. Process. 112(1), 191–196 (2013).
[Crossref]
A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large Area Direct Fabrication of periodic Arrays using Interference Patterning,” Phys. Proc. 12, 214–220 (2011).
[Crossref]
J. J. J. Kaakkunen, K. Paivasaari, and P. Vahimaa, “Fabrication of large-area hole arrays using high-efficiency two-grating interference system and femtosecond laser ablation,” Appl. Phys., A Mater. Sci. Process. 103(2), 267–270 (2011).
[Crossref]
E. Molotokaitė, M. Gedvilas, G. Račiukaitis, and V. Girdauskas, “Picosecond Laser Beam Interference Ablation of Thin Metal Films on Glass Substrate,” J. Laser Micro Nanoeng. 5(1), 74–79 (2010).
[Crossref]
J. Huang, S. Beckemper, A. Gillner, and K. Wang, “Tunable surface texturing by polarization-controlled three-beam interference,” J. Micromech. Microeng. 20(9), 095004 (2010).
[Crossref]
Y. Bourgin, S. Bakkali, Y. Jourlin, S. Tonchev, and O. Parriaux, “Monolithic double-grating phase mask for large-period highly coherent grating printing,” Opt. Lett. 34(24), 3800–3802 (2009).
[Crossref]
[PubMed]
J. Ihlemann and R. Weichenhain-Schriever, “Laser Based Rapid Fabrication of SiO2-phase Masks for Efficient UV-laser Micromachining,” J. Laser Micro Nanoeng. 4(2), 100–103 (2009).
[Crossref]
J. Békési, J. Meinertz, J. Ihlemann, and P. Simon, “Grating Interferometers for Efficient Generation of Large Area Grating Structures via Laser Ablation,” J. Laser Micro Nanoeng. 2(3), 221–224 (2007).
[Crossref]
J. Ihlemann, J.-H. Klein-Wiele, J. Bekesi, and P. Simon, “UV Ultrafast Laser Processing using Phase Masks,” J. Phys. Conf. Ser. 59, 449–452 (2007).
[Crossref]
K. Paivasaari, J. J. J. Kaakkunen, M. Kuittinen, and T. Jaaskelainen, “Enhanced optical absorptance of metals using interferometric femtosecond ablation,” Opt. Express 15(21), 13838–13843 (2007).
[Crossref]
[PubMed]
L. Wu, Y. Zhong, C. T. Chan, K. S. Wong, and G. P. Wang, “Fabrication of large area two- and three-dimensional polymer photonic crystals using single refracting prism holographic lithography,” Appl. Phys. Lett. 86(24), 241102 (2005).
[Crossref]
J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, “Multiphoton-induced periodic microstructures inside bulk azodye-doped polymers by multibeam laser interference,” Chem. Phys. Lett. 399(1-3), 276–279 (2004).
[Crossref]
S. Juodkazis, T. Kondo, V. Mizeikis, S. Matsuo, H. Murata, and H. Misawa, “Three-dimensional recording by femtosecond pulses in dielectrics,” Proc. SPIE 4977, 94–108 (2003).
[Crossref]
J.-H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett. 83(23), 4707–4709 (2003).
[Crossref]
T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]
P. Simon and J. Ihlemann, “Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses,” Appl. Phys., A Mater. Sci. Process. 63(5), 505–508 (1996).
[Crossref]
P. E. Dyer, R. J. Farley, R. Giedl, and D. M. Karnakis, “Excimer laser ablation of polymers and glasses for grating fabrication,” Appl. Surf. Sci. 96–98, 537–549 (1996).
[Crossref]
M. Steger, C. Hartmann, S. Beckemper, J. Holtkamp, and A. Gillner, “Fabrication of Hierarchical Structures by Direct Laser Writing and Multi-Beam-Interference,” J. Laser Micro Nanoeng. 8(3), 210–215 (2013).
[Crossref]
J. Huang, S. Beckemper, A. Gillner, and K. Wang, “Tunable surface texturing by polarization-controlled three-beam interference,” J. Micromech. Microeng. 20(9), 095004 (2010).
[Crossref]
J. Bekesi, P. Simon, and J. Ihlemann, “Deterministic sub-micron 2D grating structures on steel by UV-fs-laser interference patterning,” Appl. Phys., A Mater. Sci. Process. 114(1), 69–73 (2014).
[Crossref]
J. Bekesi, J. Meinertz, P. Simon, and J. Ihlemann, “Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation,” Appl. Phys., A Mater. Sci. Process. 110(1), 17–21 (2013).
[Crossref]
J. Ihlemann, J.-H. Klein-Wiele, J. Bekesi, and P. Simon, “UV Ultrafast Laser Processing using Phase Masks,” J. Phys. Conf. Ser. 59, 449–452 (2007).
[Crossref]
J. Békési, J. Meinertz, J. Ihlemann, and P. Simon, “Grating Interferometers for Efficient Generation of Large Area Grating Structures via Laser Ablation,” J. Laser Micro Nanoeng. 2(3), 221–224 (2007).
[Crossref]
A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large Area Direct Fabrication of periodic Arrays using Interference Patterning,” Phys. Proc. 12, 214–220 (2011).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
L. Wu, Y. Zhong, C. T. Chan, K. S. Wong, and G. P. Wang, “Fabrication of large area two- and three-dimensional polymer photonic crystals using single refracting prism holographic lithography,” Appl. Phys. Lett. 86(24), 241102 (2005).
[Crossref]
X. Jia and L. Dong, “Fabrication of complex micro/nanopatterns on semiconductors by the multi-beam interference of femtosecond laser,” Phys. Proc. 56, 1059–1065 (2014).
[Crossref]
P. E. Dyer, R. J. Farley, R. Giedl, and D. M. Karnakis, “Excimer laser ablation of polymers and glasses for grating fabrication,” Appl. Surf. Sci. 96–98, 537–549 (1996).
[Crossref]
P. E. Dyer, R. J. Farley, R. Giedl, and D. M. Karnakis, “Excimer laser ablation of polymers and glasses for grating fabrication,” Appl. Surf. Sci. 96–98, 537–549 (1996).
[Crossref]
J. Meinertz, T. Fricke-Begemann, and J. Ihlemann, “Micron and sub-micron gratings on glass by UV laser ablation,” Phys. Proc. 41, 701–705 (2013).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
S. Indrisiunas, B. Voisiat, M. Gedvilas, and G. Raciukaitis, “Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation,” J. Micromech. Microeng. 23(9), 095034 (2013).
[Crossref]
E. Molotokaitė, M. Gedvilas, G. Račiukaitis, and V. Girdauskas, “Picosecond Laser Beam Interference Ablation of Thin Metal Films on Glass Substrate,” J. Laser Micro Nanoeng. 5(1), 74–79 (2010).
[Crossref]
P. E. Dyer, R. J. Farley, R. Giedl, and D. M. Karnakis, “Excimer laser ablation of polymers and glasses for grating fabrication,” Appl. Surf. Sci. 96–98, 537–549 (1996).
[Crossref]
M. Steger, C. Hartmann, S. Beckemper, J. Holtkamp, and A. Gillner, “Fabrication of Hierarchical Structures by Direct Laser Writing and Multi-Beam-Interference,” J. Laser Micro Nanoeng. 8(3), 210–215 (2013).
[Crossref]
J. Huang, S. Beckemper, A. Gillner, and K. Wang, “Tunable surface texturing by polarization-controlled three-beam interference,” J. Micromech. Microeng. 20(9), 095004 (2010).
[Crossref]
E. Molotokaitė, M. Gedvilas, G. Račiukaitis, and V. Girdauskas, “Picosecond Laser Beam Interference Ablation of Thin Metal Films on Glass Substrate,” J. Laser Micro Nanoeng. 5(1), 74–79 (2010).
[Crossref]
M. Steger, C. Hartmann, S. Beckemper, J. Holtkamp, and A. Gillner, “Fabrication of Hierarchical Structures by Direct Laser Writing and Multi-Beam-Interference,” J. Laser Micro Nanoeng. 8(3), 210–215 (2013).
[Crossref]
J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, “Multiphoton-induced periodic microstructures inside bulk azodye-doped polymers by multibeam laser interference,” Chem. Phys. Lett. 399(1-3), 276–279 (2004).
[Crossref]
Y. Nakata, K. Murakawa, K. Sonoda, K. Momoo, N. Miyanaga, and T. Hiromoto, “Designing of interference pattern in ultra-short pulse laser processing,” Appl. Phys., A Mater. Sci. Process. 112(1), 191–196 (2013).
[Crossref]
M. Steger, C. Hartmann, S. Beckemper, J. Holtkamp, and A. Gillner, “Fabrication of Hierarchical Structures by Direct Laser Writing and Multi-Beam-Interference,” J. Laser Micro Nanoeng. 8(3), 210–215 (2013).
[Crossref]
J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, “Multiphoton-induced periodic microstructures inside bulk azodye-doped polymers by multibeam laser interference,” Chem. Phys. Lett. 399(1-3), 276–279 (2004).
[Crossref]
J. Huang, S. Beckemper, A. Gillner, and K. Wang, “Tunable surface texturing by polarization-controlled three-beam interference,” J. Micromech. Microeng. 20(9), 095004 (2010).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
J. Bekesi, P. Simon, and J. Ihlemann, “Deterministic sub-micron 2D grating structures on steel by UV-fs-laser interference patterning,” Appl. Phys., A Mater. Sci. Process. 114(1), 69–73 (2014).
[Crossref]
J. Meinertz, T. Fricke-Begemann, and J. Ihlemann, “Micron and sub-micron gratings on glass by UV laser ablation,” Phys. Proc. 41, 701–705 (2013).
[Crossref]
J. Bekesi, J. Meinertz, P. Simon, and J. Ihlemann, “Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation,” Appl. Phys., A Mater. Sci. Process. 110(1), 17–21 (2013).
[Crossref]
J. Ihlemann and R. Weichenhain-Schriever, “Laser Based Rapid Fabrication of SiO2-phase Masks for Efficient UV-laser Micromachining,” J. Laser Micro Nanoeng. 4(2), 100–103 (2009).
[Crossref]
J. Ihlemann, J.-H. Klein-Wiele, J. Bekesi, and P. Simon, “UV Ultrafast Laser Processing using Phase Masks,” J. Phys. Conf. Ser. 59, 449–452 (2007).
[Crossref]
J. Békési, J. Meinertz, J. Ihlemann, and P. Simon, “Grating Interferometers for Efficient Generation of Large Area Grating Structures via Laser Ablation,” J. Laser Micro Nanoeng. 2(3), 221–224 (2007).
[Crossref]
P. Simon and J. Ihlemann, “Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses,” Appl. Phys., A Mater. Sci. Process. 63(5), 505–508 (1996).
[Crossref]
S. Indrisiunas, B. Voisiat, M. Gedvilas, and G. Raciukaitis, “Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation,” J. Micromech. Microeng. 23(9), 095034 (2013).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
X. Jia and L. Dong, “Fabrication of complex micro/nanopatterns on semiconductors by the multi-beam interference of femtosecond laser,” Phys. Proc. 56, 1059–1065 (2014).
[Crossref]
S. Juodkazis, T. Kondo, V. Mizeikis, S. Matsuo, H. Murata, and H. Misawa, “Three-dimensional recording by femtosecond pulses in dielectrics,” Proc. SPIE 4977, 94–108 (2003).
[Crossref]
T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]
J. J. J. Kaakkunen, K. Paivasaari, and P. Vahimaa, “Fabrication of large-area hole arrays using high-efficiency two-grating interference system and femtosecond laser ablation,” Appl. Phys., A Mater. Sci. Process. 103(2), 267–270 (2011).
[Crossref]
K. Paivasaari, J. J. J. Kaakkunen, M. Kuittinen, and T. Jaaskelainen, “Enhanced optical absorptance of metals using interferometric femtosecond ablation,” Opt. Express 15(21), 13838–13843 (2007).
[Crossref]
[PubMed]
J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, “Multiphoton-induced periodic microstructures inside bulk azodye-doped polymers by multibeam laser interference,” Chem. Phys. Lett. 399(1-3), 276–279 (2004).
[Crossref]
P. E. Dyer, R. J. Farley, R. Giedl, and D. M. Karnakis, “Excimer laser ablation of polymers and glasses for grating fabrication,” Appl. Surf. Sci. 96–98, 537–549 (1996).
[Crossref]
J. Ihlemann, J.-H. Klein-Wiele, J. Bekesi, and P. Simon, “UV Ultrafast Laser Processing using Phase Masks,” J. Phys. Conf. Ser. 59, 449–452 (2007).
[Crossref]
J.-H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett. 83(23), 4707–4709 (2003).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
F. Knorr, A. Uyttendaele, J. Stauch, F. Schechtel, Y. Reg, and M. Zimmermann, “Large-angle programmable direct laser interference patterning with ultrafast laser using spatial light modulator,” Phys. Proc. 83, 1170–1177 (2016).
[Crossref]
S. Juodkazis, T. Kondo, V. Mizeikis, S. Matsuo, H. Murata, and H. Misawa, “Three-dimensional recording by femtosecond pulses in dielectrics,” Proc. SPIE 4977, 94–108 (2003).
[Crossref]
T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]
A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large Area Direct Fabrication of periodic Arrays using Interference Patterning,” Phys. Proc. 12, 214–220 (2011).
[Crossref]
A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large Area Direct Fabrication of periodic Arrays using Interference Patterning,” Phys. Proc. 12, 214–220 (2011).
[Crossref]
D. Wang, Z. Wang, Z. Zhang, Y. Yue, D. Li, and C. Maple, “Effects of polarization on four-beam laser interference lithography,” Appl. Phys. Lett. 102(8), 081903 (2013).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
D. Wang, Z. Wang, Z. Zhang, Y. Yue, D. Li, and C. Maple, “Effects of polarization on four-beam laser interference lithography,” Appl. Phys. Lett. 102(8), 081903 (2013).
[Crossref]
Y. Nakata, Y. Matsuba, and N. Miyanaga, “Sub-micron period metal lattices fabricated by interfering ultraviolet femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 122(5), 532 (2016).
[Crossref]
S. Juodkazis, T. Kondo, V. Mizeikis, S. Matsuo, H. Murata, and H. Misawa, “Three-dimensional recording by femtosecond pulses in dielectrics,” Proc. SPIE 4977, 94–108 (2003).
[Crossref]
T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]
J. Bekesi, J. Meinertz, P. Simon, and J. Ihlemann, “Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation,” Appl. Phys., A Mater. Sci. Process. 110(1), 17–21 (2013).
[Crossref]
J. Meinertz, T. Fricke-Begemann, and J. Ihlemann, “Micron and sub-micron gratings on glass by UV laser ablation,” Phys. Proc. 41, 701–705 (2013).
[Crossref]
J. Békési, J. Meinertz, J. Ihlemann, and P. Simon, “Grating Interferometers for Efficient Generation of Large Area Grating Structures via Laser Ablation,” J. Laser Micro Nanoeng. 2(3), 221–224 (2007).
[Crossref]
J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, “Multiphoton-induced periodic microstructures inside bulk azodye-doped polymers by multibeam laser interference,” Chem. Phys. Lett. 399(1-3), 276–279 (2004).
[Crossref]
S. Juodkazis, T. Kondo, V. Mizeikis, S. Matsuo, H. Murata, and H. Misawa, “Three-dimensional recording by femtosecond pulses in dielectrics,” Proc. SPIE 4977, 94–108 (2003).
[Crossref]
T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]
Y. Nakata, Y. Matsuba, and N. Miyanaga, “Sub-micron period metal lattices fabricated by interfering ultraviolet femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 122(5), 532 (2016).
[Crossref]
Y. Nakata, K. Murakawa, K. Sonoda, K. Momoo, N. Miyanaga, and T. Hiromoto, “Designing of interference pattern in ultra-short pulse laser processing,” Appl. Phys., A Mater. Sci. Process. 112(1), 191–196 (2013).
[Crossref]
S. Juodkazis, T. Kondo, V. Mizeikis, S. Matsuo, H. Murata, and H. Misawa, “Three-dimensional recording by femtosecond pulses in dielectrics,” Proc. SPIE 4977, 94–108 (2003).
[Crossref]
E. Molotokaitė, M. Gedvilas, G. Račiukaitis, and V. Girdauskas, “Picosecond Laser Beam Interference Ablation of Thin Metal Films on Glass Substrate,” J. Laser Micro Nanoeng. 5(1), 74–79 (2010).
[Crossref]
Y. Nakata, K. Murakawa, K. Sonoda, K. Momoo, N. Miyanaga, and T. Hiromoto, “Designing of interference pattern in ultra-short pulse laser processing,” Appl. Phys., A Mater. Sci. Process. 112(1), 191–196 (2013).
[Crossref]
Y. Nakata, K. Murakawa, K. Sonoda, K. Momoo, N. Miyanaga, and T. Hiromoto, “Designing of interference pattern in ultra-short pulse laser processing,” Appl. Phys., A Mater. Sci. Process. 112(1), 191–196 (2013).
[Crossref]
S. Juodkazis, T. Kondo, V. Mizeikis, S. Matsuo, H. Murata, and H. Misawa, “Three-dimensional recording by femtosecond pulses in dielectrics,” Proc. SPIE 4977, 94–108 (2003).
[Crossref]
Y. Nakata, Y. Matsuba, and N. Miyanaga, “Sub-micron period metal lattices fabricated by interfering ultraviolet femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 122(5), 532 (2016).
[Crossref]
Y. Nakata, K. Murakawa, K. Sonoda, K. Momoo, N. Miyanaga, and T. Hiromoto, “Designing of interference pattern in ultra-short pulse laser processing,” Appl. Phys., A Mater. Sci. Process. 112(1), 191–196 (2013).
[Crossref]
J. J. J. Kaakkunen, K. Paivasaari, and P. Vahimaa, “Fabrication of large-area hole arrays using high-efficiency two-grating interference system and femtosecond laser ablation,” Appl. Phys., A Mater. Sci. Process. 103(2), 267–270 (2011).
[Crossref]
K. Paivasaari, J. J. J. Kaakkunen, M. Kuittinen, and T. Jaaskelainen, “Enhanced optical absorptance of metals using interferometric femtosecond ablation,” Opt. Express 15(21), 13838–13843 (2007).
[Crossref]
[PubMed]
J. Si, Z. Meng, S. Kanehira, J. Qiu, B. Hua, and K. Hirao, “Multiphoton-induced periodic microstructures inside bulk azodye-doped polymers by multibeam laser interference,” Chem. Phys. Lett. 399(1-3), 276–279 (2004).
[Crossref]
S. Indrisiunas, B. Voisiat, M. Gedvilas, and G. Raciukaitis, “Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation,” J. Micromech. Microeng. 23(9), 095034 (2013).
[Crossref]
E. Molotokaitė, M. Gedvilas, G. Račiukaitis, and V. Girdauskas, “Picosecond Laser Beam Interference Ablation of Thin Metal Films on Glass Substrate,” J. Laser Micro Nanoeng. 5(1), 74–79 (2010).
[Crossref]
F. Knorr, A. Uyttendaele, J. Stauch, F. Schechtel, Y. Reg, and M. Zimmermann, “Large-angle programmable direct laser interference patterning with ultrafast laser using spatial light modulator,” Phys. Proc. 83, 1170–1177 (2016).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large Area Direct Fabrication of periodic Arrays using Interference Patterning,” Phys. Proc. 12, 214–220 (2011).
[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
[Crossref]
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[Crossref]
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[Crossref]
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[Crossref]
L. Wu, Y. Zhong, C. T. Chan, K. S. Wong, and G. P. Wang, “Fabrication of large area two- and three-dimensional polymer photonic crystals using single refracting prism holographic lithography,” Appl. Phys. Lett. 86(24), 241102 (2005).
[Crossref]
F. Knorr, A. Uyttendaele, J. Stauch, F. Schechtel, Y. Reg, and M. Zimmermann, “Large-angle programmable direct laser interference patterning with ultrafast laser using spatial light modulator,” Phys. Proc. 83, 1170–1177 (2016).
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[Crossref]
D. Wang, Z. Wang, Z. Zhang, Y. Yue, D. Li, and C. Maple, “Effects of polarization on four-beam laser interference lithography,” Appl. Phys. Lett. 102(8), 081903 (2013).
[Crossref]
J.-H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett. 83(23), 4707–4709 (2003).
[Crossref]
Y. Nakata, K. Murakawa, K. Sonoda, K. Momoo, N. Miyanaga, and T. Hiromoto, “Designing of interference pattern in ultra-short pulse laser processing,” Appl. Phys., A Mater. Sci. Process. 112(1), 191–196 (2013).
[Crossref]
J. J. J. Kaakkunen, K. Paivasaari, and P. Vahimaa, “Fabrication of large-area hole arrays using high-efficiency two-grating interference system and femtosecond laser ablation,” Appl. Phys., A Mater. Sci. Process. 103(2), 267–270 (2011).
[Crossref]
J. Bekesi, P. Simon, and J. Ihlemann, “Deterministic sub-micron 2D grating structures on steel by UV-fs-laser interference patterning,” Appl. Phys., A Mater. Sci. Process. 114(1), 69–73 (2014).
[Crossref]
J. Bekesi, J. Meinertz, P. Simon, and J. Ihlemann, “Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation,” Appl. Phys., A Mater. Sci. Process. 110(1), 17–21 (2013).
[Crossref]
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[Crossref]
Y. Nakata, Y. Matsuba, and N. Miyanaga, “Sub-micron period metal lattices fabricated by interfering ultraviolet femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 122(5), 532 (2016).
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[Crossref]
J. Békési, J. Meinertz, J. Ihlemann, and P. Simon, “Grating Interferometers for Efficient Generation of Large Area Grating Structures via Laser Ablation,” J. Laser Micro Nanoeng. 2(3), 221–224 (2007).
[Crossref]
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[Crossref]
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[Crossref]
J. Ihlemann and R. Weichenhain-Schriever, “Laser Based Rapid Fabrication of SiO2-phase Masks for Efficient UV-laser Micromachining,” J. Laser Micro Nanoeng. 4(2), 100–103 (2009).
[Crossref]
J. Huang, S. Beckemper, A. Gillner, and K. Wang, “Tunable surface texturing by polarization-controlled three-beam interference,” J. Micromech. Microeng. 20(9), 095004 (2010).
[Crossref]
S. Indrisiunas, B. Voisiat, M. Gedvilas, and G. Raciukaitis, “Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation,” J. Micromech. Microeng. 23(9), 095034 (2013).
[Crossref]
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[Crossref]
D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, E. Yakovlev, V. Roddatis, M. E. Garcia, B. Rethfeld, J. Ihlemann, and P. Simon, “Experimental and theoretical investigation of periodic nanostructuring of Au with ultrashort UV laser pulses near the damage threshold,” Phys. Rev. Appl. 4(6), 064006 (2015).
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