Abstract

We propose a method to fabricate interference filters using Plasma Enhanced Chemical Vapor Deposition (PECVD) to reduce blue and near-infrared wavelengths that are inherent to LED lighting, but that have a negative impact on human health and the environment respectively. We developed a Si-rich silicon nitride (Si-rich SixNy) material, with a very high refractive index, a high extinction coefficient in the blue range and a very low extinction coefficient in the rest of the spectrum. We combined this Si-rich SixNy with silicon oxide (SiOx) to realize an LED interference filter. The use of a material with a selective absorbance and high refractive index allows a simple fabrication process of the filter composed of six layers only, even for a complex spectral response. Moreover, the filter response is uniform and tolerant to incidence angle variation. With this work, we demonstrate the high potential of PECVD technique for the fabrication of low cost and reproducible interference filters that could be used in various applications.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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  1. D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
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  3. A. De Almeida, B. Santos, B. Paolo, and M. Quicheron, “Solid state lighting review - Potential and challenges in Europe,” Renew. Sustain. Energy Rev. 34, 30–48 (2014).
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  4. D. Gall, “Die Messung circadianer Strahlungsgrössen,” Licht und Gesundh. 114–132 (2004).
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    [Crossref] [PubMed]
  8. G. Di Bella, F. Mascia, L. Gualano, and L. Di Bella, “Melatonin anticancer effects: review,” Int. J. Mol. Sci. 14(2), 2410–2430 (2013).
    [Crossref] [PubMed]
  9. S. M. Pawson, “LED lighting increases the ecological impact of light pollution irrespective of colour temperature,” Ecol. Appl. 23, 515–522 (2013).
  10. M. Chen, “Chlorophyll modifications and their spectral extension in oxygenic photosynthesis,” Annu. Rev. Biochem. 83(1), 317–340 (2014).
    [Crossref] [PubMed]
  11. K. J. Gaston and J. Bennie, “Demographic effects of artificial nighttime lighting on animal populations,” Environ. Rev. 8(22), 323–330 (2014).
    [Crossref]
  12. D. Garg, P. B. Henderson, R. E. Hollingsworth, and D. G. Jensen, “An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition,” Mater. Sci. Eng. B. 119, 224–231 (2005).
  13. Y.-H. Peng, C.-H. Chen, C.-C. Chang, Y.-S. Lee, T.-S. Huang, C.-Y. Hou, K.-F. Huang, and Y.-Y. Tseng, “24.3: 32-inch LCD TV Using Conventional PECVD Microcrystalline-Silicon TFTs,” SID Symp. Dig. Tech. Pap. 39, 333 (2008).
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  14. S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
    [Crossref]
  15. A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
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  16. H. E. Martinez, A. Kosarev, A. B. Pevtsov, A. V. Zherzdev, N. A. Feoktistov, and Y. Kudriavtsev, “High contrast distributed Bragg reflectors based on Si:H/SiC:H PECVD multilayer structure,” 2016 13th Int. Conf. Electr. Eng. Sci. Autom. Control. CCE 2016 (2016).
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  17. R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
    [Crossref]
  18. A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
    [Crossref] [PubMed]
  19. P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
    [Crossref]
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  21. Z. Yin and F. W. Smith, “Tetrahedron model for the optical dielectric function of hydrogenated amorphous silicon nitride alloys,” Phys. Rev. B Condens. Matter 42(6), 3658–3665 (1990).
    [Crossref] [PubMed]
  22. J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
    [Crossref]
  23. D. Gall and K. Bieske, “Definition and measurement of circadian radiometric quantities,” (2004).

2015 (2)

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

2014 (3)

A. De Almeida, B. Santos, B. Paolo, and M. Quicheron, “Solid state lighting review - Potential and challenges in Europe,” Renew. Sustain. Energy Rev. 34, 30–48 (2014).
[Crossref]

M. Chen, “Chlorophyll modifications and their spectral extension in oxygenic photosynthesis,” Annu. Rev. Biochem. 83(1), 317–340 (2014).
[Crossref] [PubMed]

K. J. Gaston and J. Bennie, “Demographic effects of artificial nighttime lighting on animal populations,” Environ. Rev. 8(22), 323–330 (2014).
[Crossref]

2013 (3)

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

G. Di Bella, F. Mascia, L. Gualano, and L. Di Bella, “Melatonin anticancer effects: review,” Int. J. Mol. Sci. 14(2), 2410–2430 (2013).
[Crossref] [PubMed]

S. M. Pawson, “LED lighting increases the ecological impact of light pollution irrespective of colour temperature,” Ecol. Appl. 23, 515–522 (2013).

2012 (3)

M. Bessho and K. Shimizu, “Latest trends in LED lighting,” Electron. Commun. Jpn. 95(1), 1–7 (2012).
[Crossref]

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

2008 (1)

2006 (1)

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

2005 (1)

D. Garg, P. B. Henderson, R. E. Hollingsworth, and D. G. Jensen, “An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition,” Mater. Sci. Eng. B. 119, 224–231 (2005).

2002 (1)

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

1990 (1)

Z. Yin and F. W. Smith, “Tetrahedron model for the optical dielectric function of hydrogenated amorphous silicon nitride alloys,” Phys. Rev. B Condens. Matter 42(6), 3658–3665 (1990).
[Crossref] [PubMed]

Aimez, V.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref] [PubMed]

Araujo, D.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Arès, R.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

BaHammam, A. S.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Bekhtari, A.

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

Bennie, J.

K. J. Gaston and J. Bennie, “Demographic effects of artificial nighttime lighting on animal populations,” Environ. Rev. 8(22), 323–330 (2014).
[Crossref]

Bera, M. K.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Bessho, M.

M. Bessho and K. Shimizu, “Latest trends in LED lighting,” Electron. Commun. Jpn. 95(1), 1–7 (2012).
[Crossref]

Bharti, V. K.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Bhat, J. C.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Bieske, K.

D. Gall and K. Bieske, “Definition and measurement of circadian radiometric quantities,” (2004).

Blais, S.

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

Bremond, G.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Brown, G. M.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Cardinali, D. P.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Charette, P.

Charette, P. G.

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

Chen, M.

M. Chen, “Chlorophyll modifications and their spectral extension in oxygenic photosynthesis,” Annu. Rev. Biochem. 83(1), 317–340 (2014).
[Crossref] [PubMed]

Chor, E. F.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Collins, D.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

De Almeida, A.

A. De Almeida, B. Santos, B. Paolo, and M. Quicheron, “Solid state lighting review - Potential and challenges in Europe,” Renew. Sustain. Energy Rev. 34, 30–48 (2014).
[Crossref]

De la Torre, J.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Di Bella, G.

G. Di Bella, F. Mascia, L. Gualano, and L. Di Bella, “Melatonin anticancer effects: review,” Int. J. Mol. Sci. 14(2), 2410–2430 (2013).
[Crossref] [PubMed]

Di Bella, L.

G. Di Bella, F. Mascia, L. Gualano, and L. Di Bella, “Melatonin anticancer effects: review,” Int. J. Mol. Sci. 14(2), 2410–2430 (2013).
[Crossref] [PubMed]

Dolmanan, S. B.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

El Amrani, A.

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

El Bouayadi, R.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

El Kechai, A.

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

Epicier, T.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Fafard, S.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

Fletcher, R. M.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Gall, D.

D. Gall and K. Bieske, “Definition and measurement of circadian radiometric quantities,” (2004).

Garg, D.

D. Garg, P. B. Henderson, R. E. Hollingsworth, and D. G. Jensen, “An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition,” Mater. Sci. Eng. B. 119, 224–231 (2005).

Gaston, K. J.

K. J. Gaston and J. Bennie, “Demographic effects of artificial nighttime lighting on animal populations,” Environ. Rev. 8(22), 323–330 (2014).
[Crossref]

Gorin, A.

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref] [PubMed]

Grondin, E.

Gualano, L.

G. Di Bella, F. Mascia, L. Gualano, and L. Di Bella, “Melatonin anticancer effects: review,” Int. J. Mol. Sci. 14(2), 2410–2430 (2013).
[Crossref] [PubMed]

Hardeland, R.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Henderson, P. B.

D. Garg, P. B. Henderson, R. E. Hollingsworth, and D. G. Jensen, “An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition,” Mater. Sci. Eng. B. 119, 224–231 (2005).

Holcomb, M. O.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Hollingsworth, R. E.

D. Garg, P. B. Henderson, R. E. Hollingsworth, and D. G. Jensen, “An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition,” Mater. Sci. Eng. B. 119, 224–231 (2005).

Homier, R.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

Jaouad, A.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref] [PubMed]

Jaussaud, C.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Jensen, D. G.

D. Garg, P. B. Henderson, R. E. Hollingsworth, and D. G. Jensen, “An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition,” Mater. Sci. Eng. B. 119, 224–231 (2005).

Kaminski, A.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Kaur, C.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Kyaw, L. M.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Lelièvre, J. F.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Lemiti, M.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Liu, Y.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Ludowise, M. J.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Mahiou, L.

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

Maoudj, M.

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

Martin, P. S.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Mascia, F.

G. Di Bella, F. Mascia, L. Gualano, and L. Di Bella, “Melatonin anticancer effects: review,” Int. J. Mol. Sci. 14(2), 2410–2430 (2013).
[Crossref] [PubMed]

Masson, D.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

Menari, H.

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

Monna, R.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Ngoo, Y. J.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Pandi-Perumal, S. R.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Paolo, B.

A. De Almeida, B. Santos, B. Paolo, and M. Quicheron, “Solid state lighting review - Potential and challenges in Europe,” Renew. Sustain. Energy Rev. 34, 30–48 (2014).
[Crossref]

Pawson, S. M.

S. M. Pawson, “LED lighting increases the ecological impact of light pollution irrespective of colour temperature,” Ecol. Appl. 23, 515–522 (2013).

Pirot, M.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Quicheron, M.

A. De Almeida, B. Santos, B. Paolo, and M. Quicheron, “Solid state lighting review - Potential and challenges in Europe,” Renew. Sustain. Energy Rev. 34, 30–48 (2014).
[Crossref]

Ribeyron, P. J.

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Rudaz, S. L.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Santos, B.

A. De Almeida, B. Santos, B. Paolo, and M. Quicheron, “Solid state lighting review - Potential and challenges in Europe,” Renew. Sustain. Energy Rev. 34, 30–48 (2014).
[Crossref]

Shimizu, K.

M. Bessho and K. Shimizu, “Latest trends in LED lighting,” Electron. Commun. Jpn. 95(1), 1–7 (2012).
[Crossref]

Singh, S. P.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Smith, F. W.

Z. Yin and F. W. Smith, “Tetrahedron model for the optical dielectric function of hydrogenated amorphous silicon nitride alloys,” Phys. Rev. B Condens. Matter 42(6), 3658–3665 (1990).
[Crossref] [PubMed]

Spence, D. W.

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Steigerwald, D. A.

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Tripathy, S.

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Turala, A.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

Valdivia, C. E.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

Wallace, S. G.

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

Yin, Z.

Z. Yin and F. W. Smith, “Tetrahedron model for the optical dielectric function of hydrogenated amorphous silicon nitride alloys,” Phys. Rev. B Condens. Matter 42(6), 3658–3665 (1990).
[Crossref] [PubMed]

Zermatten, P.

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

Annu. Rev. Biochem. (1)

M. Chen, “Chlorophyll modifications and their spectral extension in oxygenic photosynthesis,” Annu. Rev. Biochem. 83(1), 317–340 (2014).
[Crossref] [PubMed]

Ecol. Appl. (1)

S. M. Pawson, “LED lighting increases the ecological impact of light pollution irrespective of colour temperature,” Ecol. Appl. 23, 515–522 (2013).

Electron. Commun. Jpn. (1)

M. Bessho and K. Shimizu, “Latest trends in LED lighting,” Electron. Commun. Jpn. 95(1), 1–7 (2012).
[Crossref]

Environ. Rev. (1)

K. J. Gaston and J. Bennie, “Demographic effects of artificial nighttime lighting on animal populations,” Environ. Rev. 8(22), 323–330 (2014).
[Crossref]

IEEE J. Photovoltaics (1)

R. Homier, A. Jaouad, A. Turala, C. E. Valdivia, D. Masson, S. G. Wallace, S. Fafard, R. Arès, and V. Aimez, “Antireflection coating design for triple-junction III-V/Ge high-efficiency solar cells using low absorption PECVD silicon nitride,” IEEE J. Photovoltaics 2(3), 393–397 (2012).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

D. A. Steigerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, “Illumination with solid state lighting technology,” IEEE J. Sel. Top. Quantum Electron. 8(2), 310–320 (2002).
[Crossref]

Int. J. Mol. Sci. (1)

G. Di Bella, F. Mascia, L. Gualano, and L. Di Bella, “Melatonin anticancer effects: review,” Int. J. Mol. Sci. 14(2), 2410–2430 (2013).
[Crossref] [PubMed]

J. Phys. D Appl. Phys. (1)

S. P. Singh, Y. Liu, Y. J. Ngoo, L. M. Kyaw, M. K. Bera, S. B. Dolmanan, S. Tripathy, and E. F. Chor, “Influence of PECVD deposited SiN x passivation layer thickness on In 0.18 Al 0.82 N/GaN/Si HEMT,” J. Phys. D Appl. Phys. 48(36), 365104 (2015).
[Crossref]

Jpn. J. Appl. Phys. (1)

P. Zermatten, A. Jaouad, S. Blais, A. Gorin, V. Aimez, and P. G. Charette, “Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range,” Jpn. J. Appl. Phys. 51(11R), 110205 (2012).
[Crossref]

Mater. Sci. Eng. B. (1)

D. Garg, P. B. Henderson, R. E. Hollingsworth, and D. G. Jensen, “An economic analysis of the deposition of electrochromic WO3 via sputtering or plasma enhanced chemical vapor deposition,” Mater. Sci. Eng. B. 119, 224–231 (2005).

Neurotox. Res. (1)

S. R. Pandi-Perumal, A. S. BaHammam, G. M. Brown, D. W. Spence, V. K. Bharti, C. Kaur, R. Hardeland, and D. P. Cardinali, “Melatonin antioxidative defense: therapeutical implications for aging and neurodegenerative processes,” Neurotox. Res. 23(3), 267–300 (2013).
[Crossref] [PubMed]

Opt. Express (1)

Phys. Rev. B Condens. Matter (1)

Z. Yin and F. W. Smith, “Tetrahedron model for the optical dielectric function of hydrogenated amorphous silicon nitride alloys,” Phys. Rev. B Condens. Matter 42(6), 3658–3665 (1990).
[Crossref] [PubMed]

Renew. Sustain. Energy Rev. (1)

A. De Almeida, B. Santos, B. Paolo, and M. Quicheron, “Solid state lighting review - Potential and challenges in Europe,” Renew. Sustain. Energy Rev. 34, 30–48 (2014).
[Crossref]

Thin Solid Films (1)

J. F. Lelièvre, J. De la Torre, A. Kaminski, G. Bremond, M. Lemiti, R. El Bouayadi, D. Araujo, T. Epicier, R. Monna, M. Pirot, P. J. Ribeyron, and C. Jaussaud, “Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD,” Thin Solid Films 511–512, 103–107 (2006).
[Crossref]

Vacuum (1)

A. El Amrani, A. Bekhtari, A. El Kechai, H. Menari, L. Mahiou, and M. Maoudj, “Efficient passivation of solar cells by silicon nitride,” Vacuum 120, 95–99 (2015).
[Crossref]

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Y.-H. Peng, C.-H. Chen, C.-C. Chang, Y.-S. Lee, T.-S. Huang, C.-Y. Hou, K.-F. Huang, and Y.-Y. Tseng, “24.3: 32-inch LCD TV Using Conventional PECVD Microcrystalline-Silicon TFTs,” SID Symp. Dig. Tech. Pap. 39, 333 (2008).
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Figures (8)
Fig. 1
Fig. 1 (a) Melatonin Suppression Action Spectrum (MSAS) [4]. High values correspond to a reduction of the melatonin secretion. (b) Ideal spectral response of a LED I-F to correctly attenuate blue, red and IR wavelengths without impacting the rest of the visible spectrum.

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Fig. 2
Fig. 2 Refractive index (a) and extinction coefficient (b) of Si-rich SixNy for different ratios of silane/ammonia. Both refractive index and extinction coefficient increase when this ratio increases.

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Fig. 3
Fig. 3 Simulation of the spectral response of a 6-layer structure PECVD LED I-F. Si-rich SixNy-A, B and C is used as the HRI material in Fig. 3(a), 3(b) and 3(c) respectively. PECVD SiOx is used as the LRI material for all 3 figures. The best spectral response was found with the Si-rich SixNy-B. All simulated structures were designed to fit the targeted spectrum at 0° incidence angle.

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Fig. 4
Fig. 4 (a) Impact of a ± 0.31% thickness error on the SiOx layers on the spectral response. (b) Impact of a ± 5.62% thickness error on the Si-rich SixNy-B layers on the spectral response.

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Fig. 5
Fig. 5 (a) Relative thickness standard deviation of the Si-rich SixNy-B thin film with respect to the deposition pressure at 300 °C and 350 °C. (b) Optical properties at 450 nm of the Si-rich SixNy-B thin film with respect to the deposition pressure at 300 °C and 350 °C.

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Fig. 6
Fig. 6 (a) Spectral response of the 6-layer PECVD I-F measured with a spectrophotometer at 0° incidence angle. (b) Simulation of the transmitted spectrum of a white LED through the 6-layer PECVD LED I-F and through the 16-layer sputtered LED I-F.

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Fig. 7
Fig. 7 Transmitted spectra of a typical streetlamp white LED through the 6-layer PECVD LED I-F (a) and through the 16-layer sputtered LED I-F (b) for different incidence angles. (c) Mean squared errors with respect for the targeted spectrum of each spectral response, at different incidence angles.

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Fig. 8
Fig. 8 Correlated Color Temperature (CCT) in Kelvin of a white LED through the 6-layer PECVD LED I-F and through the 16-layer sputtered LED I-F, with respect to the incidence angle.

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Tables (2)

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Table 1 Gas flow rates and optical properties of SiOx and Si-rich SixNy

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Table 2 Detailed structure of a 6-layer PECVD LED I-F

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