Highly sensitive silicon photonic temperature sensor based on liquid crystal filled slot waveguide directional coupler

Li-Yuan Chiang; Chun-Ta Wang; Ting-Syuan Lin; Steve Pappert; Paul Yu

doi:10.1364/OE.403710

Optics Express
Vol. 28,
Issue 20,
pp. 29345-29356
(2020)
•https://doi.org/10.1364/OE.403710

Highly sensitive silicon photonic temperature sensor based on liquid crystal filled slot waveguide directional coupler

Li-Yuan Chiang, Chun-Ta Wang, Ting-Syuan Lin, Steve Pappert, and Paul Yu

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Li-Yuan Chiang, Chun-Ta Wang, Ting-Syuan Lin, Steve Pappert, and Paul Yu, "Highly sensitive silicon photonic temperature sensor based on liquid crystal filled slot waveguide directional coupler," Opt. Express 28, 29345-29356 (2020)

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- Instrumentation, Measurement, and Optical Sensors
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About this Article
History
- Original Manuscript: July 27, 2020
- Revised Manuscript: September 7, 2020
- Manuscript Accepted: September 7, 2020
- Published: September 17, 2020

Abstract

A highly sensitive silicon photonic temperature sensor based on silicon-on-insulator (SOI) platform has been proposed and demonstrated. A two-mode nano-slot waveguide device structure cladded with a nematic liquid crystal (LC), E7, was adopted to facilitate strong light-matter interaction and achieve high sensitivity. The fabricated sensor was characterized by measuring the optical transmission spectra at different ambient temperatures. The extracted temperature sensitivities of the E7-filled device are 0.810 nm/°C around room temperature and 1.619 nm/°C near 50°C, which match well with simulation results based on a theoretical analysis. The results obtained represent the highest experimentally demonstrated temperature sensitivity for a silicon-waveguide temperature sensor on SOI platform. The slot waveguide directional coupler device configuration provides submicron one-dimensional spatial resolution and flexible selection in LC materials for designing temperature sensitivity and operational temperature range required by specific applications.

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Year
Author
Publication

H.-R. Kim, E. Jang, and S.-D. Lee, “Electrooptic temperature sensor based on a Fabry–Pérot resonator with a liquid crystal film,” IEEE Photonics Technol. Lett. 18(8), 905–907 (2006).
[Crossref]
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[Crossref]
T. Muñoz-Hernandez, E. Reyes-Vera, and P. Torres, “Temperature Sensor Based on Whispering Gallery Modes of Metal-Filled Side-Hole Photonic Crystal Fiber Resonators,” IEEE Sens. J. 20(16), 1 (2020).
[Crossref]
R. Wang, Q. Wu, X. Jiang, T. Fan, J. Guo, C. Wang, F. Zhang, Y. Gao, M. Zhang, Z. Luo, and H. Zhang, “A few-layer InSe-based sensitivity-enhanced photothermal fiber sensor,” J. Mater. Chem. C 8(1), 132–138 (2020).
[Crossref]
E. Reyes-Vera, C. M. B. Cordeiro, and P. Torres, “Highly sensitive temperature sensor using a Sagnac loop interferometer based on a side-hole photonic crystal fiber filled with metal,” Appl. Opt. 56(2), 156–162 (2017).
[Crossref]
Y. Li, G.-F. Yan, and H. Sailing, “Thin-Core Fiber Sandwiched Photonic Crystal Fiber Modal Interferometer for Temperature and Refractive Index Sensing,” IEEE Sens. J. 18(16), 6627–6632 (2018).
[Crossref]
G. Chesini, J. H. Osório, V. A. Serrão, M. A. R. Franco, and C. M. B. Cordeiro, “Metal-Filled Embedded-Core Capillary Fibers as Highly Sensitive Temperature Sensors,” IEEE Sens. Lett. 2(2), 1–4 (2018).
[Crossref]
I. S. Amiri, P. Yupapin, M. M. Ariannejad, and S. Daud, “High sensitive temperature sensor silicon-based microring resonator using the broadband input spectrum,” Results Phys. 9, 1578–1584 (2018).
[Crossref]
D. Niu, X. Wang, S. Sun, M. Jiang, Q. Xu, F. Wang, Y. Wu, and D. Zhang, “Polymer/silica hybrid waveguide temperature sensor based on asymmetric Mach–Zehnder interferometer,” J. Opt. 20(4), 045803 (2018).
[Crossref]
R. Dwivedi and A. Kumar, “Ultrahigh-sensitive temperature sensor based on modal interference in a metal-under-clad ridge waveguide with a polymer upper cladding,” Appl. Opt. 56(16), 4685–4689 (2017).
[Crossref]
D. Niu, L. Wang, Q. Xu, M. Jiang, X. Wang, X. Sun, F. Wang, and D. Zhang, “Ultra-sensitive polymeric waveguide temperature sensor based on asymmetric Mach–Zehnder interferometer,” Appl. Opt. 58(5), 1276–1280 (2019).
[Crossref]
Y. Zhang, J. Zou, and J.-J. He, “Temperature sensor with enhanced sensitivity based on silicon Mach-Zehnder interferometer with waveguide group index engineering,” Opt. Express 26(20), 26057–26064 (2018).
[Crossref]
J.-M. Lee, “Ultrahigh temperature-sensitive silicon MZI with titania cladding,” Front. Mater. 2, 36 (2015).
[Crossref]
X. Guan, X. Wang, and L. H. Frandsen, “Optical temperature sensor with enhanced sensitivity by employing hybrid waveguides in a silicon Mach-Zehnder interferometer,” Opt. Express 24(15), 16349–16356 (2016).
[Crossref]
A. Irace and G. Breglio, “All-silicon optical temperature sensor based on Multi-Mode Interference,” Opt. Express 11(22), 2807–2812 (2003).
[Crossref]
G.-D. Kim, H.-S. Lee, C.-H. Park, S.-S. Lee, B. T. Lim, H. K. Bae, and W.-G. Lee, “Silicon photonic temperature sensor employing a ring resonator manufactured using a standard CMOS process,” Opt. Express 18(21), 22215–22221 (2010).
[Crossref]
H.-T. Kim and M. Yu, “Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range,” Opt. Express 24(9), 9501–9510 (2016).
[Crossref]
H. Xu, M. Hafezi, J. Fan, J. M. Taylor, G. F. Strouse, and Z. Ahmed, “Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures,” Opt. Express 22(3), 3098–3104 (2014).
[Crossref]
N. N. Klimov, S. Mittal, M. Berger, and Z. Ahmed, “On-chip silicon waveguide Bragg grating photonic temperature sensor,” Opt. Lett. 40(17), 3934–3936 (2015).
[Crossref]
H. Yan, X. Xiao, J. Zang, X. Xia, Y. Chen, and Y. Huang, “High-sensitivity temperature sensor by coupling two-dimensional photonic crystal waveguide with dual microcavities,” Opt. Eng. 57(10), 1 (2018).
[Crossref]
Y. Zhang, P. Liu, S. Zhang, W. Liu, J. Chen, and Y. Shi, “High sensitivity temperature sensor based on cascaded silicon photonic crystal nanobeam cavities,” Opt. Express 24(20), 23037–23043 (2016).
[Crossref]
R. Dekker, N. Usechak, M. Forst, and A. Driessen, “Ultrafast nonlinear all-optical processes in silicon-on-insulator waveguides,” J. Phys. D: Appl. Phys. 40(14), R249–R271 (2007).
[Crossref]
I. A. Goncharenko, V. Kireenko, and M. Marciniak, “Optimizing the structure of optical temperature sensors on the base of slot and double-slot ring waveguides with liquid crystal filling,” Opt. Eng. 53(7), 071802 (2013).
[Crossref]
C.-T. Wang, C.-Y. Wang, J.-H. Yu, I.-T. Kuo, C.-W. Tseng, H.-C. Jau, Y.-J. Chen, and T.-H. Lin, “Highly sensitive optical temperature sensor based on a SiN micro-ring resonator with liquid crystal cladding,” Opt. Express 24(2), 1002–1007 (2016).
[Crossref]
F. Dell’Olio and V. M. N. Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15(8), 4977–4993 (2007).
[Crossref]
V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004).
[Crossref]
V. M. N. Passaro, F. Dell’Olio, B. Casamassima, and F. De Leonardis, “Guided-Wave Optical Biosensors,” Sensors 7(4), 508–536 (2007).
[Crossref]
I.-C. Khoo and S.-T. Wu, Optics and Nonlinear Optics of Liquid Crystals (World Scientific, 1993).
J. Li and S.-T. Wu, “Infrared refractive indices of liquid crystals,” J. Appl. Phys. 97(7), 073501 (2005).
[Crossref]
J. Li, S. Gauzia, and S.-T. Wu, “High temperature-gradient refractive index liquid crystals,” Opt. Express 12(9), 2002–2010 (2004).
[Crossref]
Hani Nejadriahi, Alex Friedman, Rajat Sharma, Steve Pappert, Yeshaiahu Fainman, and Paul Yu, “Thermo-Optic Properties of Silicon-Rich Silicon Nitride for On-chip Applications,” arXiv:2005.13348v1 (2020).
W. K. Burns, “Normal mode analysis of waveguide devices. I. Theory,” J. Lightwave Technol. 6(6), 1051–1057 (1988).
[Crossref]
H. Desmet, K. Neyts, and R. Baets, “Liquid crystal orientation on patterns etched in Silicon on Insulator,” in Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series (61831Z), (2006).
J. Pfeifle, L. Alloatti, W. Freude, J. Leuthold, and C. Koos, “Silicon-organic hybrid phase shifter based on a slot waveguide with a liquid-crystal cladding,” Opt. Express 20(14), 15359–15376 (2012).
[Crossref]
M. Uenuma and T. Motooka, “Temperature-independent silicon waveguide optical filter,” Opt. Lett. 34(5), 599–601 (2009).
[Crossref]
Y. Kim, B. Senyuk, and O. Lavrentovich, “Molecular reorientation of a nematic liquid crystal by thermal expansion,” Nat. Commun. 3(1), 1133 (2012).
[Crossref]
Y. Xing, T. Ako, J. P. George, D. Korn, H. Yu, P. Verheyen, M. Pantouvaki, G. Lepage, P. Absil, A. Ruocco, C. Koos, J. Leuthold, K. Neyts, J. Beeckman, and W. Bogaerts, “Digitally Controlled Phase Shifter Using an SOI Slot Waveguide With Liquid Crystal Infiltration,” IEEE Photonics Technol. Lett. 27(12), 1269–1272 (2015).
[Crossref]

2020 (2)

T. Muñoz-Hernandez, E. Reyes-Vera, and P. Torres, “Temperature Sensor Based on Whispering Gallery Modes of Metal-Filled Side-Hole Photonic Crystal Fiber Resonators,” IEEE Sens. J. 20(16), 1 (2020).
[Crossref]

R. Wang, Q. Wu, X. Jiang, T. Fan, J. Guo, C. Wang, F. Zhang, Y. Gao, M. Zhang, Z. Luo, and H. Zhang, “A few-layer InSe-based sensitivity-enhanced photothermal fiber sensor,” J. Mater. Chem. C 8(1), 132–138 (2020).
[Crossref]

2019 (1)

D. Niu, L. Wang, Q. Xu, M. Jiang, X. Wang, X. Sun, F. Wang, and D. Zhang, “Ultra-sensitive polymeric waveguide temperature sensor based on asymmetric Mach–Zehnder interferometer,” Appl. Opt. 58(5), 1276–1280 (2019).
[Crossref]

2018 (6)

Y. Zhang, J. Zou, and J.-J. He, “Temperature sensor with enhanced sensitivity based on silicon Mach-Zehnder interferometer with waveguide group index engineering,” Opt. Express 26(20), 26057–26064 (2018).
[Crossref]

Y. Li, G.-F. Yan, and H. Sailing, “Thin-Core Fiber Sandwiched Photonic Crystal Fiber Modal Interferometer for Temperature and Refractive Index Sensing,” IEEE Sens. J. 18(16), 6627–6632 (2018).
[Crossref]

G. Chesini, J. H. Osório, V. A. Serrão, M. A. R. Franco, and C. M. B. Cordeiro, “Metal-Filled Embedded-Core Capillary Fibers as Highly Sensitive Temperature Sensors,” IEEE Sens. Lett. 2(2), 1–4 (2018).
[Crossref]

I. S. Amiri, P. Yupapin, M. M. Ariannejad, and S. Daud, “High sensitive temperature sensor silicon-based microring resonator using the broadband input spectrum,” Results Phys. 9, 1578–1584 (2018).
[Crossref]

D. Niu, X. Wang, S. Sun, M. Jiang, Q. Xu, F. Wang, Y. Wu, and D. Zhang, “Polymer/silica hybrid waveguide temperature sensor based on asymmetric Mach–Zehnder interferometer,” J. Opt. 20(4), 045803 (2018).
[Crossref]

H. Yan, X. Xiao, J. Zang, X. Xia, Y. Chen, and Y. Huang, “High-sensitivity temperature sensor by coupling two-dimensional photonic crystal waveguide with dual microcavities,” Opt. Eng. 57(10), 1 (2018).
[Crossref]

2017 (2)

R. Dwivedi and A. Kumar, “Ultrahigh-sensitive temperature sensor based on modal interference in a metal-under-clad ridge waveguide with a polymer upper cladding,” Appl. Opt. 56(16), 4685–4689 (2017).
[Crossref]

E. Reyes-Vera, C. M. B. Cordeiro, and P. Torres, “Highly sensitive temperature sensor using a Sagnac loop interferometer based on a side-hole photonic crystal fiber filled with metal,” Appl. Opt. 56(2), 156–162 (2017).
[Crossref]

2016 (4)

X. Guan, X. Wang, and L. H. Frandsen, “Optical temperature sensor with enhanced sensitivity by employing hybrid waveguides in a silicon Mach-Zehnder interferometer,” Opt. Express 24(15), 16349–16356 (2016).
[Crossref]

H.-T. Kim and M. Yu, “Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range,” Opt. Express 24(9), 9501–9510 (2016).
[Crossref]

Y. Zhang, P. Liu, S. Zhang, W. Liu, J. Chen, and Y. Shi, “High sensitivity temperature sensor based on cascaded silicon photonic crystal nanobeam cavities,” Opt. Express 24(20), 23037–23043 (2016).
[Crossref]

C.-T. Wang, C.-Y. Wang, J.-H. Yu, I.-T. Kuo, C.-W. Tseng, H.-C. Jau, Y.-J. Chen, and T.-H. Lin, “Highly sensitive optical temperature sensor based on a SiN micro-ring resonator with liquid crystal cladding,” Opt. Express 24(2), 1002–1007 (2016).
[Crossref]

2015 (3)

Y. Xing, T. Ako, J. P. George, D. Korn, H. Yu, P. Verheyen, M. Pantouvaki, G. Lepage, P. Absil, A. Ruocco, C. Koos, J. Leuthold, K. Neyts, J. Beeckman, and W. Bogaerts, “Digitally Controlled Phase Shifter Using an SOI Slot Waveguide With Liquid Crystal Infiltration,” IEEE Photonics Technol. Lett. 27(12), 1269–1272 (2015).
[Crossref]

N. N. Klimov, S. Mittal, M. Berger, and Z. Ahmed, “On-chip silicon waveguide Bragg grating photonic temperature sensor,” Opt. Lett. 40(17), 3934–3936 (2015).
[Crossref]

J.-M. Lee, “Ultrahigh temperature-sensitive silicon MZI with titania cladding,” Front. Mater. 2, 36 (2015).
[Crossref]

2014 (1)

H. Xu, M. Hafezi, J. Fan, J. M. Taylor, G. F. Strouse, and Z. Ahmed, “Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures,” Opt. Express 22(3), 3098–3104 (2014).
[Crossref]

2013 (1)

I. A. Goncharenko, V. Kireenko, and M. Marciniak, “Optimizing the structure of optical temperature sensors on the base of slot and double-slot ring waveguides with liquid crystal filling,” Opt. Eng. 53(7), 071802 (2013).
[Crossref]

2012 (3)

Y. Kim, B. Senyuk, and O. Lavrentovich, “Molecular reorientation of a nematic liquid crystal by thermal expansion,” Nat. Commun. 3(1), 1133 (2012).
[Crossref]

J. Pfeifle, L. Alloatti, W. Freude, J. Leuthold, and C. Koos, “Silicon-organic hybrid phase shifter based on a slot waveguide with a liquid-crystal cladding,” Opt. Express 20(14), 15359–15376 (2012).
[Crossref]

S. J. Mihailov, “Fiber Bragg grating sensors for harsh environments,” Sensors 12(2), 1898–1918 (2012).
[Crossref]

R. Dekker, N. Usechak, M. Forst, and A. Driessen, “Ultrafast nonlinear all-optical processes in silicon-on-insulator waveguides,” J. Phys. D: Appl. Phys. 40(14), R249–R271 (2007).
[Crossref]

V. M. N. Passaro, F. Dell’Olio, B. Casamassima, and F. De Leonardis, “Guided-Wave Optical Biosensors,” Sensors 7(4), 508–536 (2007).
[Crossref]

2006 (1)

H.-R. Kim, E. Jang, and S.-D. Lee, “Electrooptic temperature sensor based on a Fabry–Pérot resonator with a liquid crystal film,” IEEE Photonics Technol. Lett. 18(8), 905–907 (2006).
[Crossref]

2005 (1)

J. Li and S.-T. Wu, “Infrared refractive indices of liquid crystals,” J. Appl. Phys. 97(7), 073501 (2005).
[Crossref]

2004 (2)

J. Li, S. Gauzia, and S.-T. Wu, “High temperature-gradient refractive index liquid crystals,” Opt. Express 12(9), 2002–2010 (2004).
[Crossref]

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004).
[Crossref]

2003 (1)

A. Irace and G. Breglio, “All-silicon optical temperature sensor based on Multi-Mode Interference,” Opt. Express 11(22), 2807–2812 (2003).
[Crossref]

1988 (1)

W. K. Burns, “Normal mode analysis of waveguide devices. I. Theory,” J. Lightwave Technol. 6(6), 1051–1057 (1988).
[Crossref]

Absil, P.

Ahmed, Z.

N. N. Klimov, S. Mittal, M. Berger, and Z. Ahmed, “On-chip silicon waveguide Bragg grating photonic temperature sensor,” Opt. Lett. 40(17), 3934–3936 (2015).
[Crossref]

Ako, T.

Alloatti, L.

Almeida, V. R.

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004).
[Crossref]

Amiri, I. S.

Ariannejad, M. M.

Bae, H. K.

Baets, R.

H. Desmet, K. Neyts, and R. Baets, “Liquid crystal orientation on patterns etched in Silicon on Insulator,” in Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series (61831Z), (2006).

Barrios, C. A.

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004).
[Crossref]

Beeckman, J.

Berger, M.

N. N. Klimov, S. Mittal, M. Berger, and Z. Ahmed, “On-chip silicon waveguide Bragg grating photonic temperature sensor,” Opt. Lett. 40(17), 3934–3936 (2015).
[Crossref]

Bogaerts, W.

Breglio, G.

A. Irace and G. Breglio, “All-silicon optical temperature sensor based on Multi-Mode Interference,” Opt. Express 11(22), 2807–2812 (2003).
[Crossref]

Burns, W. K.

W. K. Burns, “Normal mode analysis of waveguide devices. I. Theory,” J. Lightwave Technol. 6(6), 1051–1057 (1988).
[Crossref]

Casamassima, B.

V. M. N. Passaro, F. Dell’Olio, B. Casamassima, and F. De Leonardis, “Guided-Wave Optical Biosensors,” Sensors 7(4), 508–536 (2007).
[Crossref]

Chen, J.

Chen, Y.

Chen, Y.-J.

Chesini, G.

Cordeiro, C. M. B.

Daud, S.

De Leonardis, F.

V. M. N. Passaro, F. Dell’Olio, B. Casamassima, and F. De Leonardis, “Guided-Wave Optical Biosensors,” Sensors 7(4), 508–536 (2007).
[Crossref]

Dekker, R.

R. Dekker, N. Usechak, M. Forst, and A. Driessen, “Ultrafast nonlinear all-optical processes in silicon-on-insulator waveguides,” J. Phys. D: Appl. Phys. 40(14), R249–R271 (2007).
[Crossref]

Dell’Olio, F.

V. M. N. Passaro, F. Dell’Olio, B. Casamassima, and F. De Leonardis, “Guided-Wave Optical Biosensors,” Sensors 7(4), 508–536 (2007).
[Crossref]

F. Dell’Olio and V. M. N. Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15(8), 4977–4993 (2007).
[Crossref]

Desmet, H.

Driessen, A.

R. Dekker, N. Usechak, M. Forst, and A. Driessen, “Ultrafast nonlinear all-optical processes in silicon-on-insulator waveguides,” J. Phys. D: Appl. Phys. 40(14), R249–R271 (2007).
[Crossref]

Dwivedi, R.

Fainman, Yeshaiahu

Hani Nejadriahi, Alex Friedman, Rajat Sharma, Steve Pappert, Yeshaiahu Fainman, and Paul Yu, “Thermo-Optic Properties of Silicon-Rich Silicon Nitride for On-chip Applications,” arXiv:2005.13348v1 (2020).

Fan, J.

Fan, T.

Forst, M.

R. Dekker, N. Usechak, M. Forst, and A. Driessen, “Ultrafast nonlinear all-optical processes in silicon-on-insulator waveguides,” J. Phys. D: Appl. Phys. 40(14), R249–R271 (2007).
[Crossref]

Franco, M. A. R.

Frandsen, L. H.

Freude, W.

Friedman, Alex

Gao, Y.

Gauzia, S.

J. Li, S. Gauzia, and S.-T. Wu, “High temperature-gradient refractive index liquid crystals,” Opt. Express 12(9), 2002–2010 (2004).
[Crossref]

George, J. P.

Goncharenko, I. A.

Guan, X.

Guo, J.

Hafezi, M.

He, J.-J.

Huang, Y.

Irace, A.

A. Irace and G. Breglio, “All-silicon optical temperature sensor based on Multi-Mode Interference,” Opt. Express 11(22), 2807–2812 (2003).
[Crossref]

Jang, E.

Jau, H.-C.

Jiang, M.

Jiang, X.

Khoo, I.-C.

I.-C. Khoo and S.-T. Wu, Optics and Nonlinear Optics of Liquid Crystals (World Scientific, 1993).

Kim, G.-D.

Kim, H.-R.

Kim, H.-T.

H.-T. Kim and M. Yu, “Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range,” Opt. Express 24(9), 9501–9510 (2016).
[Crossref]

Kim, Y.

Y. Kim, B. Senyuk, and O. Lavrentovich, “Molecular reorientation of a nematic liquid crystal by thermal expansion,” Nat. Commun. 3(1), 1133 (2012).
[Crossref]

Kireenko, V.

Klimov, N. N.

N. N. Klimov, S. Mittal, M. Berger, and Z. Ahmed, “On-chip silicon waveguide Bragg grating photonic temperature sensor,” Opt. Lett. 40(17), 3934–3936 (2015).
[Crossref]

Koos, C.

Korn, D.

Kumar, A.

Kuo, I.-T.

Lavrentovich, O.

Y. Kim, B. Senyuk, and O. Lavrentovich, “Molecular reorientation of a nematic liquid crystal by thermal expansion,” Nat. Commun. 3(1), 1133 (2012).
[Crossref]

Lee, H.-S.

Lee, J.-M.

J.-M. Lee, “Ultrahigh temperature-sensitive silicon MZI with titania cladding,” Front. Mater. 2, 36 (2015).
[Crossref]

Lee, S.-D.

Lee, S.-S.

Lee, W.-G.

Lepage, G.

Leuthold, J.

Li, J.

J. Li and S.-T. Wu, “Infrared refractive indices of liquid crystals,” J. Appl. Phys. 97(7), 073501 (2005).
[Crossref]

J. Li, S. Gauzia, and S.-T. Wu, “High temperature-gradient refractive index liquid crystals,” Opt. Express 12(9), 2002–2010 (2004).
[Crossref]

Li, Y.

Lim, B. T.

Lin, T.-H.

Lipson, M.

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004).
[Crossref]

Liu, P.

Liu, W.

Luo, Z.

Marciniak, M.

Mihailov, S. J.

S. J. Mihailov, “Fiber Bragg grating sensors for harsh environments,” Sensors 12(2), 1898–1918 (2012).
[Crossref]

Mittal, S.

N. N. Klimov, S. Mittal, M. Berger, and Z. Ahmed, “On-chip silicon waveguide Bragg grating photonic temperature sensor,” Opt. Lett. 40(17), 3934–3936 (2015).
[Crossref]

Motooka, T.

M. Uenuma and T. Motooka, “Temperature-independent silicon waveguide optical filter,” Opt. Lett. 34(5), 599–601 (2009).
[Crossref]

Muñoz-Hernandez, T.

Nejadriahi, Hani

Neyts, K.

Niu, D.

Osório, J. H.

Pantouvaki, M.

Pappert, Steve

Park, C.-H.

Passaro, V. M. N.

V. M. N. Passaro, F. Dell’Olio, B. Casamassima, and F. De Leonardis, “Guided-Wave Optical Biosensors,” Sensors 7(4), 508–536 (2007).
[Crossref]

F. Dell’Olio and V. M. N. Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15(8), 4977–4993 (2007).
[Crossref]

Pfeifle, J.

Reyes-Vera, E.

Ruocco, A.

Sailing, H.

Senyuk, B.

Y. Kim, B. Senyuk, and O. Lavrentovich, “Molecular reorientation of a nematic liquid crystal by thermal expansion,” Nat. Commun. 3(1), 1133 (2012).
[Crossref]

Serrão, V. A.

Sharma, Rajat

Shi, Y.

Strouse, G. F.

Sun, S.

Sun, X.

Taylor, J. M.

Torres, P.

Tseng, C.-W.

Uenuma, M.

M. Uenuma and T. Motooka, “Temperature-independent silicon waveguide optical filter,” Opt. Lett. 34(5), 599–601 (2009).
[Crossref]

Usechak, N.

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Fig. 1. (a) Schematic of the proposed sensor device showing a cross section at the slot waveguide active region. A LC cladding covers the active region and fills the nano-slot. An ac electric field is used to align the LC molecules perpendicular to the slot waveguide direction. Conductive silicon coupled arms and silicon slab sections help to realize a highly confined electric field profile across the slot. (b) The TE-like optical field of the fundamental symmetric mode and (c) the first-order anti-symmetric mode. They constitute the propagating supermodes in the slot waveguide region.

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Fig. 2. Temperature-dependent refractive indices of E7 at 1550 nm wavelength.

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Fig. 3. (a)-(j) Schematic representation of the fabrication flow of the proposed sensor. (k) Optical microscope image of the fabricated silicon slot-waveguide DC before LC infiltration at the slot region.

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Fig. 4. Schematic diagram of the experimental setup for temperature sensitivity characterization at near infrared wavelengths.

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Fig. 5. Optical spectral responses of the air-cladded sensor (a) at room temperatures and (b) above 50°C. S is represented by the trough wavelength shift with temperature change.

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Fig. 6. Optical spectral responses of the LC(E7)-infiltrated sensor (a) at room temperatures and (b) above 50°C.

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Fig. 7. Measured wavelength shift with temperature for the air-cladded and E7-filled device conditions (a) at room temperatures and (b) above 50°C.

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Fig. 8. Optical spectral responses of the air-cladded sensor (a) at 24.9°C and (b) at 52.4°C and and LC(E7)-infiltrated sensor (c) at 27.2°C and (d) at 52.0°C.

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Tables (2)

Table 1. Measured and simulated sensitivities of the fabricated sensor device

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Table 2. Comparison of recently reported photonic temperature sensors based on SOI platform

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Equations (8)

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L = m \cdot 2 L_{c c} = \frac{m λ}{(n_{e f f, s} - n_{e f f, a})}

m_{mod} = m - (\frac{\partial n_{e f f, s}}{\partial λ} - \frac{\partial n_{e f f, a}}{\partial λ}) \cdot L

S = \frac{\partial λ}{\partial T} = \frac{L}{m_{mod}} \cdot (\frac{\partial n_{e f f, s}}{\partial T} - \frac{\partial n_{e f f, a}}{\partial T}) = \frac{λ}{(n_{g, s} - n_{g, a})} \cdot (\frac{\partial n_{e f f, s}}{\partial T} - \frac{\partial n_{e f f, a}}{\partial T})

F S R = \frac{λ^{2}}{L \cdot | n_{g, s} - n_{g, a} |}

| \frac{L}{L_{c c} (T)} - \frac{L}{L_{c c} (T + T π)} | = 1

T π = \frac{λ}{2 L \cdot | \frac{\partial n_{e f f, s}}{\partial T} - \frac{\partial n_{e f f, a}}{\partial T} |}

| S | = \frac{F S R}{2 T π}

Δ T r = 2 T π = \frac{F S R}{| S |} = \frac{λ}{L \cdot | \frac{\partial n_{e f f, s}}{\partial T} - \frac{\partial n_{e f f, a}}{\partial T} |}

	Experimental		Simulated
Slot condition	Temp. (°C)	Sensitivity (nm/°C)	Temp. (°C)	Sensitivity (nm/°C)	Error (%)
Air-cladded	24.7-29.3	0.110	27	0.108	1.8
Air-cladded	49.9-54.0	0.123	51	0.114	7.8
E7-filled	25.0-29.3	0.810	27	0.741	9.3
E7-filled	50.1-52.0	1.619	51	1.845	12.2

Technique	Sensitivity (nm/°C)	Reference
MZI with waveguide group index engineering	0.438	[12]
MZI with titania cladding	-0.340	[13]
MZI with Silicon/polymer hybrid waveguide employed	0.172	[14]
Ring resonator manufactured using a standard CMOS process	0.083	[16]
Cascaded ring resonator	0.294	[17]
Chip-based ring resonator	0.077	[18]
On-chip waveguide Bragg grating	0.082	[19]
Coupling two-dimensional photonic crystal waveguide with Si/polymer dual microcavities	0.125	[20]
Cascaded silicon photonic crystal nanobeam cavities	0.163	[21]
Liquid crystal filled slot waveguide directional coupler	0.810 (at T∼27°C) 1.619 (at T∼51°C)	This work

	Experimental		Simulated
Slot condition	Temp. (°C)	Sensitivity (nm/°C)	Temp. (°C)	Sensitivity (nm/°C)	Error (%)
Air-cladded	24.7-29.3	0.110	27	0.108	1.8
Air-cladded	49.9-54.0	0.123	51	0.114	7.8
E7-filled	25.0-29.3	0.810	27	0.741	9.3
E7-filled	50.1-52.0	1.619	51	1.845	12.2

Technique	Sensitivity (nm/°C)	Reference
MZI with waveguide group index engineering	0.438	[12]
MZI with titania cladding	-0.340	[13]
MZI with Silicon/polymer hybrid waveguide employed	0.172	[14]
Ring resonator manufactured using a standard CMOS process	0.083	[16]
Cascaded ring resonator	0.294	[17]
Chip-based ring resonator	0.077	[18]
On-chip waveguide Bragg grating	0.082	[19]
Coupling two-dimensional photonic crystal waveguide with Si/polymer dual microcavities	0.125	[20]
Cascaded silicon photonic crystal nanobeam cavities	0.163	[21]
Liquid crystal filled slot waveguide directional coupler	0.810 (at T∼27°C) 1.619 (at T∼51°C)	This work

Abstract

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