Abstract

All-dielectric meta-surfaces composed of dielectric meta-atoms with electric and magnetic multipole resonances provide a low loss alternative to plasmonic meta-surfaces in some optical research fields such as meta-lens and meta-surface holography. We utilize the digital holography lithography technique to obtain the large area meta-surface perfect reflector made of high refractive index and low loss silicon discs arrays, with the capability to delicately control the optical response in the near infrared spectrum. Three types of meta-surface reflectors (discs, truncated cones and diamond-shaped discs) were fabricated, which correspondingly exhibited nearly 1 peak reflectance and greater than 97% average reflectance in their respective perfect reflectance spectral regions. Digital holography lithography only takes 4 min to fabricate millions of photoresist disks over an area of 100 mm2, which is high processing efficiency and low cost. The fabrication strategy opens a new avenue for the production of large-area meta-surfaces in the optical field, especially in the mass production of optical communication devices, semiconductor lasers, etc.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
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  26. N. Shankhwar, R. K. Sinha, Y. Kalra, S. Makarov, A. Krasnok, and P. Belov, “High-quality laser cavity based on all-dielectric metasurfaces,” Photonics Nanostruct. 24, 18–23 (2017).
    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
  42. E. F. Kuester, M. A. Mohamed, M. Piket-May, and C. L. Holloway, “Averaged transition conditions for electromagnetic fields at a metafilm,” IEEE Trans. Antennas Propag. 51(10), 2641–2651 (2003).
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    [Crossref]

2020 (1)

Y. Zhou, H. Zheng, I. I. Kravchenko, and J. Valentine, “Flat optics for image differentiation,” Nat. Photonics 14(5), 316–323 (2020).
[Crossref]

2019 (4)

B. Reineke, B. Sain, R. Zhao, L. Carletti, B. Liu, L. Huang, C. De Angelis, and T. Zentgraf, “Silicon Metasurfaces for Third Harmonic Geometric Phase Manipulation and Multiplexed Holography,” Nano Lett. 19(9), 6585–6591 (2019).
[Crossref]

S. Divitt, W. Zhu, C. Zhang, H. J. Lezec, and A. Agrawal, “Ultrafast optical pulse shaping using dielectric metasurfaces,” Science 364(6443), 890–894 (2019).
[Crossref]

H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
[Crossref]

J.-S. Park, S. Zhang, A. She, W. T. Chen, P. Lin, K. M. A. Yousef, J.-X. Cheng, and F. Capasso, “All-Glass, Large Metalens at Visible Wavelength Using Deep-Ultraviolet Projection Lithography,” Nano Lett. 19(12), 8673–8682 (2019).
[Crossref]

2018 (6)

S. Colburn, A. Zhan, and A. Majumdar, “Varifocal zoom imaging with large area focal length adjustable metalenses,” Optica 5(7), 825–831 (2018).
[Crossref]

A. She, S. Zhang, S. Shian, D. R. Clarke, and F. Capasso, “Large area metalenses: design, characterization, and mass manufacturing,” Opt. Express 26(2), 1573–1585 (2018).
[Crossref]

M. Semmlinger, M. L. Tseng, J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum Ultraviolet Light-Generating Metasurface,” Nano Lett. 18(9), 5738–5743 (2018).
[Crossref]

Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, “Silicon Nitride Metalenses for Close-to-One Numerical Aperture and Wide-Angle Visible Imaging,” Phys. Rev. Appl. 10(1), 014005 (2018).
[Crossref]

B. Fan, D. Filonov, P. Ginzburg, and V. A. Podolskiy, “Low-frequency nonlocal and hyperbolic modes in corrugated wire metamaterials,” Opt. Express 26(13), 17541–17548 (2018).
[Crossref]

P. R. Wiecha, “pyGDM—A python toolkit for full-field electro-dynamical simulations and evolutionary optimization of nanostructures,” Comput. Phys. Commun. 233, 167–192 (2018).
[Crossref]

2017 (2)

B. A. Slovick, Y. Zhou, Z. G. Yu, I. I. Kravchenko, D. P. Briggs, P. Moitra, S. Krishnamurthy, and J. Valentine, “Metasurface polarization splitter,” Philos. Trans. R. Soc., A 375(2090), 20160072 (2017).
[Crossref]

N. Shankhwar, R. K. Sinha, Y. Kalra, S. Makarov, A. Krasnok, and P. Belov, “High-quality laser cavity based on all-dielectric metasurfaces,” Photonics Nanostruct. 24, 18–23 (2017).
[Crossref]

2016 (3)

L. Lin, Z. H. Jiang, D. Ma, S. Yun, Z. Liu, D. H. Werner, and T. S. Mayer, “Dielectric nanoresonator based lossless optical perfect magnetic mirror with near-zero reflection phase,” Appl. Phys. Lett. 108(17), 171902 (2016).
[Crossref]

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-Frequency Dielectric Metasurfaces for Multiwavelength Achromatic and Highly Dispersive Holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref]

2015 (2)

P. Moitra, B. A. Slovick, W. li, I. I. Kravchencko, D. P. Briggs, S. Krishnamurthy, and J. Valentine, “Large-Scale All-Dielectric Metamaterial Perfect Reflectors,” ACS Photonics 2(6), 692–698 (2015).
[Crossref]

X. Hu, Z. Xu, K. Li, F. Fang, and L. Wang, “Fabrication of a Au–polystyrene sphere substrate with three-dimensional nanofeatures for surface-enhanced Raman spectroscopy,” Appl. Surf. Sci. 355, 1168–1174 (2015).
[Crossref]

2014 (2)

P. Moitra, B. A. Slovick, Z. Gang Yu, S. Krishnamurthy, and J. Valentine, “Experimental demonstration of a broadband all-dielectric metamaterial perfect reflector,” Appl. Phys. Lett. 104(17), 171102 (2014).
[Crossref]

J. Zhou, A. F. Kaplan, L. Chen, and L. J. Guo, “Experiment and Theory of the Broadband Absorption by a Tapered Hyperbolic Metamaterial Array,” ACS Photonics 1(7), 618–624 (2014).
[Crossref]

2013 (4)

N. Engheta, “Pursuing Near-Zero Response,” Science 340(6130), 286–287 (2013).
[Crossref]

P. Moitra, Y. Yang, Z. Anderson, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Realization of an all-dielectric zero-index optical metamaterial,” Nat. Photonics 7(10), 791–795 (2013).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref]

B. Slovick, Z.-G. Yu, M. Berding, and S. Krishnamurthy, “Perfect dielectric-metamaterial reflector,” Phys. Rev. B 88(16), 165116 (2013).
[Crossref]

2012 (5)

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref]

S. Sun, Q. He, S. Xiao, Q. Xu, X. Li, and L. Zhou, “Gradient-index meta-surfaces as a bridge linking propagating waves and surface waves,” Nat. Mater. 11(5), 426–431 (2012).
[Crossref]

M. Kang, T. Feng, H.-T. Wang, and J. Li, “Wave front engineering from an array of thin aperture antennas,” Opt. Express 20(14), 15882–15890 (2012).
[Crossref]

H. N. S. Krishnamoorthy, Z. Jacob, E. Narimanov, I. Kretzschmar, and V. M. Menon, “Topological Transitions in Metamaterials,” Science 336(6078), 205–209 (2012).
[Crossref]

Y. Zhao, M. A. Belkin, and A. Alù, “Twisted optical metamaterials for planarized ultrathin broadband circular polarizers,” Nat. Commun. 3(1), 870 (2012).
[Crossref]

2011 (2)

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction,” Science 334(6054), 333–337 (2011).
[Crossref]

X. Huang, Y. Lai, Z. H. Hang, H. Zheng, and C. T. Chan, “Dirac cones induced by accidental degeneracy in photonic crystals and zero-refractive-index materials,” Nat. Mater. 10(8), 582–586 (2011).
[Crossref]

2010 (2)

Y. Tang and A. E. Cohen, “Optical Chirality and Its Interaction with Matter,” Phys. Rev. Lett. 104(16), 163901 (2010).
[Crossref]

L. Isa, K. Kumar, M. Müller, J. Grolig, M. Textor, and E. Reimhult, “Particle Lithography from Colloidal Self-Assembly at Liquid−Liquid Interfaces,” ACS Nano 4(10), 5665–5670 (2010).
[Crossref]

2008 (1)

J. Valentine, S. Zhang, T. Zentgraf, E. Ulin-Avila, D. A. Genov, G. Bartal, and X. Zhang, “Three-dimensional optical metamaterial with a negative refractive index,” Nature 455(7211), 376–379 (2008).
[Crossref]

2007 (1)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[Crossref]

2006 (1)

M. S. Wheeler, J. S. Aitchison, and M. Mojahedi, “Coated nonmagnetic spheres with a negative index of refraction at infrared frequencies,” Phys. Rev. B 73(4), 045105 (2006).
[Crossref]

2005 (2)

D. R. Smith, D. C. Vier, T. Koschny, and C. M. Soukoulis, “Electromagnetic parameter retrieval from inhomogeneous metamaterials,” Phys. Rev. E 71(3), 036617 (2005).
[Crossref]

M. S. Wheeler, J. S. Aitchison, and M. Mojahedi, “Three-dimensional array of dielectric spheres with an isotropic negative permeability at infrared frequencies,” Phys. Rev. B 72(19), 193103 (2005).
[Crossref]

2003 (2)

H.-W. Li, D.-J. Kang, M. G. Blamire, and W. T. S. Huck, “Focused ion beam fabrication of silicon print masters,” Nanotechnology 14(2), 220–223 (2003).
[Crossref]

E. F. Kuester, M. A. Mohamed, M. Piket-May, and C. L. Holloway, “Averaged transition conditions for electromagnetic fields at a metafilm,” IEEE Trans. Antennas Propag. 51(10), 2641–2651 (2003).
[Crossref]

2001 (2)

C. Liu, A. Datta, and Y. Wang, “Ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces,” Appl. Phys. Lett. 78(1), 120–122 (2001).
[Crossref]

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental Verification of a Negative Index of Refraction,” Science 292(5514), 77–79 (2001).
[Crossref]

Agrawal, A.

S. Divitt, W. Zhu, C. Zhang, H. J. Lezec, and A. Agrawal, “Ultrafast optical pulse shaping using dielectric metasurfaces,” Science 364(6443), 890–894 (2019).
[Crossref]

Aieta, F.

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction,” Science 334(6054), 333–337 (2011).
[Crossref]

Aitchison, J. S.

M. S. Wheeler, J. S. Aitchison, and M. Mojahedi, “Coated nonmagnetic spheres with a negative index of refraction at infrared frequencies,” Phys. Rev. B 73(4), 045105 (2006).
[Crossref]

M. S. Wheeler, J. S. Aitchison, and M. Mojahedi, “Three-dimensional array of dielectric spheres with an isotropic negative permeability at infrared frequencies,” Phys. Rev. B 72(19), 193103 (2005).
[Crossref]

Alù, A.

Y. Zhao, M. A. Belkin, and A. Alù, “Twisted optical metamaterials for planarized ultrathin broadband circular polarizers,” Nat. Commun. 3(1), 870 (2012).
[Crossref]

Anderson, Z.

P. Moitra, Y. Yang, Z. Anderson, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Realization of an all-dielectric zero-index optical metamaterial,” Nat. Photonics 7(10), 791–795 (2013).
[Crossref]

Bartal, G.

J. Valentine, S. Zhang, T. Zentgraf, E. Ulin-Avila, D. A. Genov, G. Bartal, and X. Zhang, “Three-dimensional optical metamaterial with a negative refractive index,” Nature 455(7211), 376–379 (2008).
[Crossref]

Belkin, M. A.

Y. Zhao, M. A. Belkin, and A. Alù, “Twisted optical metamaterials for planarized ultrathin broadband circular polarizers,” Nat. Commun. 3(1), 870 (2012).
[Crossref]

Belov, P.

N. Shankhwar, R. K. Sinha, Y. Kalra, S. Makarov, A. Krasnok, and P. Belov, “High-quality laser cavity based on all-dielectric metasurfaces,” Photonics Nanostruct. 24, 18–23 (2017).
[Crossref]

Berding, M.

B. Slovick, Z.-G. Yu, M. Berding, and S. Krishnamurthy, “Perfect dielectric-metamaterial reflector,” Phys. Rev. B 88(16), 165116 (2013).
[Crossref]

Blamire, M. G.

H.-W. Li, D.-J. Kang, M. G. Blamire, and W. T. S. Huck, “Focused ion beam fabrication of silicon print masters,” Nanotechnology 14(2), 220–223 (2003).
[Crossref]

Brener, I.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref]

Briggs, D. P.

B. A. Slovick, Y. Zhou, Z. G. Yu, I. I. Kravchenko, D. P. Briggs, P. Moitra, S. Krishnamurthy, and J. Valentine, “Metasurface polarization splitter,” Philos. Trans. R. Soc., A 375(2090), 20160072 (2017).
[Crossref]

P. Moitra, B. A. Slovick, W. li, I. I. Kravchencko, D. P. Briggs, S. Krishnamurthy, and J. Valentine, “Large-Scale All-Dielectric Metamaterial Perfect Reflectors,” ACS Photonics 2(6), 692–698 (2015).
[Crossref]

P. Moitra, Y. Yang, Z. Anderson, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Realization of an all-dielectric zero-index optical metamaterial,” Nat. Photonics 7(10), 791–795 (2013).
[Crossref]

Capasso, F.

J.-S. Park, S. Zhang, A. She, W. T. Chen, P. Lin, K. M. A. Yousef, J.-X. Cheng, and F. Capasso, “All-Glass, Large Metalens at Visible Wavelength Using Deep-Ultraviolet Projection Lithography,” Nano Lett. 19(12), 8673–8682 (2019).
[Crossref]

A. She, S. Zhang, S. Shian, D. R. Clarke, and F. Capasso, “Large area metalenses: design, characterization, and mass manufacturing,” Opt. Express 26(2), 1573–1585 (2018).
[Crossref]

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Figures (7)
Fig. 1.
Fig. 1. (a) The schematic architecture of the designed meta-surface reflector composed of discs. (b) The simulated reflection spectrum of the meta-surface reflector composed of discs. (c) The schematic architecture of the designed meta-surface reflector composed of diamond-shaped discs. (d) The simulated reflection spectrum of the meta-surface reflector composed of diamond-shaped discs.

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Fig. 2.
Fig. 2. (a) The preparation process of the metasurface reflector. (b) The optical principles of digital holographic lithography. (Inset (b1) shows ${\pm} 1$ orders of diffracted beams in the experimental light path. Inset (b2) shows the working principle of theoretical calculation). (c, d, e) The light intensity distribution diagram of two orthogonal interference exposures used to prepare discs array, diamond-shaped discs array, and elliptical discs array. (f) SEM images of pixelated two-dimensional silicon discs array and 10 mm ${\; } \times $ 10 mm sample image.

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Fig. 3.
Fig. 3. SEM image of discs array (a), truncated cones array (b), and diamond-shaped discs array (c). Measured and simulated reflectance spectra of discs array (d), truncated cones array (e), diamond-shaped discs array (f). Electric and magnetic dipole spectra of a disc (g) truncated cone (h), diamond-shaped disc (i).

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Fig. 4.
Fig. 4. (a) The schematic diagram of backward constructive interference between ED and MD radiation and perfect reflection in the xz-plane. (b) The phase difference between the electric dipole moment and the magnetic dipole moment. Demonstration of the radius (c) and period (d) of the disc effect on the reflection performances of the meta-surface reflector at normal incidence.

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Fig. 5.
Fig. 5. (a) The relationship between silicon nitride film thickness and reflectivity. (b) Comparison of the reflectivity of the film system before and after depositing the anti-reactive layer.

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Fig. 6.
Fig. 6. (a) The real and imaginary parts of the refractive index of silicon. The measurement data show that silicon has low loss and high refractive index characteristics in the designed perfect reflection spectrum region. (b) The real and imaginary parts of the refractive index of silicon nitride.

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Fig. 7.
Fig. 7. (a) Real part of equivalent permittivity and equivalent permeability of meta-surface reflector. (b) The imaginary part of the equivalent refractive index and the real part of the equivalent impedance of the meta-surface reflector.

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Equations (1)

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R = ( Z ′ − 1 ) 2 + Z ′ ′ 2 ( Z ′ + 1 ) 2 + Z ′ ′ 2 ,

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