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Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

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Abstract

We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of 40 deg. The device is made from a multilayer SiO2/Si3N4 surface-relief zeroth-order one-dimensional grating with a period of 0.3 µm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

© 1998 Optical Society of America

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