Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Broadband antireflection gratings fabricated upon silicon substrates

Not Accessible

Your library or personal account may give you access

Abstract

We fabricated a two-dimensional subwavelength structured (SWS) surface upon a crystal silicon substrate. The SWS surface was patterned by electron beam lithography and etched by an SF6 fast atom beam. The SWS grating had a conical profile, the period was 150 nm, and the groove was approximately 350 nm deep. The reflectivity was examined at 200–2500-nm wavelengths. At 400 nm the reflectivity decreased to 0.5% from the 54.7% of the silicon substrate. We also used He–Ne laser light to examine the reflectivity as a function of the incident angle.

© 1999 Optical Society of America

Full Article  |  PDF Article
More Like This
Antireflection microstructures fabricated upon fluorine-doped SiO2 films

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano
Opt. Lett. 26(21) 1642-1644 (2001)

Fabrication of GaAs subwavelength structure (SWS) for solar cell applications

Byung-Jae Kim and Jihyun Kim
Opt. Express 19(S3) A326-A330 (2011)

Femtosecond-laser-fabricated periodic tapered structures on a silicon substrate for terahertz antireflection

Xi Yu, Michiharu Ohta, Nobuhito Takizawa, Kazuhisa Mikame, Shingo Ono, and Jongsuck Bae
Appl. Opt. 58(35) 9595-9602 (2019)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved