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Fast-scanning two-photon fluorescence imaging based on a microelectromechanical systems two- dimensional scanning mirror

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Abstract

Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on microelectromechanical systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are 0.75mm×0.75mm in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of 16°. Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to 3.52kHz.

© 2006 Optical Society of America

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