Abstract

A bandwidth-tunable filter has been demonstrated based on a micro-electro-mechanical-system (MEMS) actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from $2.8\text{to}78.4\mathrm{GHz}$ by voltage control, the largest bandwidth tuning range reported to date to our knowledge in resonator-based filters. A $21.8\mathrm{dB}$ extinction ratio is attained as a dynamic add–drop filter.

© 2009 Optical Society of America

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