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Micromechanically tuned ring resonator in silicon on insulator

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Abstract

We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125pm.

© 2011 Optical Society of America

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