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Efficient erbium-doped thin-film lithium niobate waveguide amplifiers

Zhaoxi Chen, Qing Xu, Ke Zhang, Wing-Han Wong, De-Long Zhang, Edwin Yue-Bun Pun, and Cheng Wang

Open Access Open Access

Abstract

Lithium niobate on insulator (LNOI) is an emerging photonic platform with great promise for use in future optical communications, nonlinear optics, and microwave photonics. An important integrated photonic building block, active waveguide amplifiers, however, are still missing in the LNOI platform. Here, we report an efficient and compact waveguide amplifier based on erbium-doped LNOI waveguides, achieved using a sequence of erbium-doped crystal growth, ion slicing, and lithography-based waveguide fabrication. Using a compact 5 mm long waveguide, we demonstrate an on-chip net gain of ${\gt}{{5}}\;{\rm{dB}}$ for 1530 nm signal light with a relatively low pump power of 21 mW at 980 nm. The efficient LNOI waveguide amplifiers could become an important fundamental element in future lithium niobate photonic integrated circuits.

© 2021 Optical Society of America

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2021 (3)

Z. Wang, Z. Fang, Z. Liu, W. Chu, Y. Zhou, J. Zhang, R. Wu, M. Wang, T. Lu, and Y. Cheng, Opt. Lett. 46, 380 (2021).
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2020 (7)

S. Wang, L. Yang, R. Cheng, Y. Xu, M. Shen, R. L. Cone, C. W. Thiel, and H. X. Tang, Appl. Phys. Lett. 116, 151103 (2020).
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2019 (9)

J. Rönn, W. Zhang, A. Autere, X. Leroux, L. Pakarinen, C. Alonso-Ramos, A. Säynätjoki, H. Lipsanen, L. Vivien, E. Cassan, and Z. Sun, Nat. Commun. 10, 432 (2019).
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Y. He, Q. Yang, J. Ling, R. Luo, H. Liang, M. Li, B. Shen, H. Wang, K. Vahala, and Q. Lin, Optica 6, 1138 (2019).
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M. Wang, R. Wu, J. Lin, J. Zhang, Z. Fang, Z. Chai, and Y. Cheng, Quantum Eng. 1, e9 (2019).
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2018 (5)

R. Wolf, I. Breunig, H. Zappe, and K. Buse, Opt. Express 26, 19815 (2018).
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A. Boes, B. Corcoran, L. Chang, J. Bowers, and A. Mitchell, Laser Photon. Rev. 12, 1700256 (2018).
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2017 (1)

2014 (2)

2012 (1)

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2011 (1)

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1997 (1)

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D. Pohl, M. Reig Escalé, M. Madi, F. Kaufmann, P. Brotzer, A. Sergeyev, B. Guldimann, P. Giaccari, E. Alberti, U. Meier, and R. Grange, Nat. Photonics 14, 24 (2020).
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Bernhardi, E. H.

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Q. Luo, Z. Z. Hao, C. Yang, R. Zhang, D. H. Zheng, S. G. Liu, H. De Liu, F. Bo, Y. F. Kong, G. Q. Zhang, and J. J. Xu, Sci. China Phys. Mech. Astron. 64, 234263 (2021).
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[Crossref]

Bruch, A. W.

Brüske, D.

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M. Zhang, B. Buscaino, C. Wang, A. Shams-Ansari, C. Reimer, R. Zhu, J. M. Kahn, and M. Lončar, Nature 568, 373 (2019).
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Buse, K.

Cai, X.

M. Xu, M. He, H. Zhang, J. Jian, Y. Pan, X. Liu, L. Chen, X. Meng, H. Chen, Z. Li, X. Xiao, S. Yu, S. Yu, and X. Cai, Nat. Commun. 11, 3911 (2020).
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Cassan, E.

J. Rönn, W. Zhang, A. Autere, X. Leroux, L. Pakarinen, C. Alonso-Ramos, A. Säynätjoki, H. Lipsanen, L. Vivien, E. Cassan, and Z. Sun, Nat. Commun. 10, 432 (2019).
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Chai, Z.

M. Wang, R. Wu, J. Lin, J. Zhang, Z. Fang, Z. Chai, and Y. Cheng, Quantum Eng. 1, e9 (2019).
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Chandrasekhar, S.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, Nature 562, 101 (2018).
[Crossref]

Chang, L.

A. Boes, B. Corcoran, L. Chang, J. Bowers, and A. Mitchell, Laser Photon. Rev. 12, 1700256 (2018).
[Crossref]

Chen, B.

Chen, H.

M. Xu, M. He, H. Zhang, J. Jian, Y. Pan, X. Liu, L. Chen, X. Meng, H. Chen, Z. Li, X. Xiao, S. Yu, S. Yu, and X. Cai, Nat. Commun. 11, 3911 (2020).
[Crossref]

Chen, J. Y.

Chen, L.

M. Xu, M. He, H. Zhang, J. Jian, Y. Pan, X. Liu, L. Chen, X. Meng, H. Chen, Z. Li, X. Xiao, S. Yu, S. Yu, and X. Cai, Nat. Commun. 11, 3911 (2020).
[Crossref]

Chen, P.

B. Pan, J. Hu, Y. Huang, L. Song, J. Wang, P. Chen, L. Liu, and D. Dai, in Asia Communications and Photonics Conference (Optical Society of America, 2020), paper M4D.7.

Chen, W.

J. Zhou, Y. Liang, Z. Liu, W. Chu, H. Zhang, D. Yin, Z. Fang, R. Wu, J. Zhang, W. Chen, Z. Wang, Y. Zhou, M. Wang, and Y. Cheng, “On-chip integrated waveguide amplifiers on Erbium- doped thin film lithium niobate on insulator,” arXiv:2101.00783 (2021).

Chen, X.

Y. Liu, X. Yan, J. Wu, B. Zhu, Y. Chen, and X. Chen, Sci. China Phys. Mech. Astron. 64, 234262 (2021).
[Crossref]

S. Liu, Y. Zheng, Z. Fang, X. Ye, Y. Cheng, and X. Chen, Opt. Lett. 44, 1456 (2019).
[Crossref]

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, Nature 562, 101 (2018).
[Crossref]

Chen, Y.

Y. Liu, X. Yan, J. Wu, B. Zhu, Y. Chen, and X. Chen, Sci. China Phys. Mech. Astron. 64, 234262 (2021).
[Crossref]

Cheng, R.

S. Wang, L. Yang, R. Cheng, Y. Xu, M. Shen, R. L. Cone, C. W. Thiel, and H. X. Tang, Appl. Phys. Lett. 116, 151103 (2020).
[Crossref]

Cheng, Y.

Z. Wang, Z. Fang, Z. Liu, W. Chu, Y. Zhou, J. Zhang, R. Wu, M. Wang, T. Lu, and Y. Cheng, Opt. Lett. 46, 380 (2021).
[Crossref]

J. Lin, F. Bo, Y. Cheng, and J. Xu, Photon. Res. 8, 1910 (2020).
[Crossref]

S. Liu, Y. Zheng, Z. Fang, X. Ye, Y. Cheng, and X. Chen, Opt. Lett. 44, 1456 (2019).
[Crossref]

M. Wang, R. Wu, J. Lin, J. Zhang, Z. Fang, Z. Chai, and Y. Cheng, Quantum Eng. 1, e9 (2019).
[Crossref]

J. Zhou, Y. Liang, Z. Liu, W. Chu, H. Zhang, D. Yin, Z. Fang, R. Wu, J. Zhang, W. Chen, Z. Wang, Y. Zhou, M. Wang, and Y. Cheng, “On-chip integrated waveguide amplifiers on Erbium- doped thin film lithium niobate on insulator,” arXiv:2101.00783 (2021).

Chu, W.

Z. Wang, Z. Fang, Z. Liu, W. Chu, Y. Zhou, J. Zhang, R. Wu, M. Wang, T. Lu, and Y. Cheng, Opt. Lett. 46, 380 (2021).
[Crossref]

J. Zhou, Y. Liang, Z. Liu, W. Chu, H. Zhang, D. Yin, Z. Fang, R. Wu, J. Zhang, W. Chen, Z. Wang, Y. Zhou, M. Wang, and Y. Cheng, “On-chip integrated waveguide amplifiers on Erbium- doped thin film lithium niobate on insulator,” arXiv:2101.00783 (2021).

Cone, R. L.

S. Wang, L. Yang, R. Cheng, Y. Xu, M. Shen, R. L. Cone, C. W. Thiel, and H. X. Tang, Appl. Phys. Lett. 116, 151103 (2020).
[Crossref]

Corcoran, B.

A. Boes, B. Corcoran, L. Chang, J. Bowers, and A. Mitchell, Laser Photon. Rev. 12, 1700256 (2018).
[Crossref]

Dai, D.

B. Pan, J. Hu, Y. Huang, L. Song, J. Wang, P. Chen, L. Liu, and D. Dai, in Asia Communications and Photonics Conference (Optical Society of America, 2020), paper M4D.7.

De Liu, H.

Q. Luo, Z. Z. Hao, C. Yang, R. Zhang, D. H. Zheng, S. G. Liu, H. De Liu, F. Bo, Y. F. Kong, G. Q. Zhang, and J. J. Xu, Sci. China Phys. Mech. Astron. 64, 234263 (2021).
[Crossref]

Desiatov, B.

Dijkstra, M.

Elkus, B. S.

Fang, Z.

Z. Wang, Z. Fang, Z. Liu, W. Chu, Y. Zhou, J. Zhang, R. Wu, M. Wang, T. Lu, and Y. Cheng, Opt. Lett. 46, 380 (2021).
[Crossref]

M. Wang, R. Wu, J. Lin, J. Zhang, Z. Fang, Z. Chai, and Y. Cheng, Quantum Eng. 1, e9 (2019).
[Crossref]

S. Liu, Y. Zheng, Z. Fang, X. Ye, Y. Cheng, and X. Chen, Opt. Lett. 44, 1456 (2019).
[Crossref]

J. Zhou, Y. Liang, Z. Liu, W. Chu, H. Zhang, D. Yin, Z. Fang, R. Wu, J. Zhang, W. Chen, Z. Wang, Y. Zhou, M. Wang, and Y. Cheng, “On-chip integrated waveguide amplifiers on Erbium- doped thin film lithium niobate on insulator,” arXiv:2101.00783 (2021).

Fathpour, S.

Fejer, M. M.

Frankis, H. C.

García-Blanco, S. M.

Giaccari, P.

D. Pohl, M. Reig Escalé, M. Madi, F. Kaufmann, P. Brotzer, A. Sergeyev, B. Guldimann, P. Giaccari, E. Alberti, U. Meier, and R. Grange, Nat. Photonics 14, 24 (2020).
[Crossref]

Gong, Z.

Grange, R.

D. Pohl, M. Reig Escalé, M. Madi, F. Kaufmann, P. Brotzer, A. Sergeyev, B. Guldimann, P. Giaccari, E. Alberti, U. Meier, and R. Grange, Nat. Photonics 14, 24 (2020).
[Crossref]

Guldimann, B.

D. Pohl, M. Reig Escalé, M. Madi, F. Kaufmann, P. Brotzer, A. Sergeyev, B. Guldimann, P. Giaccari, E. Alberti, U. Meier, and R. Grange, Nat. Photonics 14, 24 (2020).
[Crossref]

Han, F.

Hao, Z. Z.

Q. Luo, Z. Z. Hao, C. Yang, R. Zhang, D. H. Zheng, S. G. Liu, H. De Liu, F. Bo, Y. F. Kong, G. Q. Zhang, and J. J. Xu, Sci. China Phys. Mech. Astron. 64, 234263 (2021).
[Crossref]

He, M.

M. Xu, M. He, H. Zhang, J. Jian, Y. Pan, X. Liu, L. Chen, X. Meng, H. Chen, Z. Li, X. Xiao, S. Yu, S. Yu, and X. Cai, Nat. Commun. 11, 3911 (2020).
[Crossref]

He, Y.

Herek, J. L.

Hofstetter, D.

Hu, H.

C. Wang, M. Zhang, M. Yu, R. Zhu, H. Hu, and M. Loncar, Nat. Commun. 10, 978 (2019).
[Crossref]

Hu, J.

B. Pan, J. Hu, Y. Huang, L. Song, J. Wang, P. Chen, L. Liu, and D. Dai, in Asia Communications and Photonics Conference (Optical Society of America, 2020), paper M4D.7.

Hua, P.

Huang, Y.

B. Pan, J. Hu, Y. Huang, L. Song, J. Wang, P. Chen, L. Liu, and D. Dai, in Asia Communications and Photonics Conference (Optical Society of America, 2020), paper M4D.7.

Huang, Y. P.

Jankowski, M.

Javid, U. A.

M. Li, J. Ling, Y. He, U. A. Javid, S. Xue, and Q. Lin, Nat. Commun. 11, 4123 (2020).
[Crossref]

Jian, J.

M. Xu, M. He, H. Zhang, J. Jian, Y. Pan, X. Liu, L. Chen, X. Meng, H. Chen, Z. Li, X. Xiao, S. Yu, S. Yu, and X. Cai, Nat. Commun. 11, 3911 (2020).
[Crossref]

Kahn, J. M.

M. Zhang, B. Buscaino, C. Wang, A. Shams-Ansari, C. Reimer, R. Zhu, J. M. Kahn, and M. Lončar, Nature 568, 373 (2019).
[Crossref]

Kanter, G. S.

Kaufmann, F.

D. Pohl, M. Reig Escalé, M. Madi, F. Kaufmann, P. Brotzer, A. Sergeyev, B. Guldimann, P. Giaccari, E. Alberti, U. Meier, and R. Grange, Nat. Photonics 14, 24 (2020).
[Crossref]

Kip, D.

Kong, Y. F.

Q. Luo, Z. Z. Hao, C. Yang, R. Zhang, D. H. Zheng, S. G. Liu, H. De Liu, F. Bo, Y. F. Kong, G. Q. Zhang, and J. J. Xu, Sci. China Phys. Mech. Astron. 64, 234263 (2021).
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Kumar, P.

Langrock, C.

Leinse, A.

Leroux, X.

J. Rönn, W. Zhang, A. Autere, X. Leroux, L. Pakarinen, C. Alonso-Ramos, A. Säynätjoki, H. Lipsanen, L. Vivien, E. Cassan, and Z. Sun, Nat. Commun. 10, 432 (2019).
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Sci. China Phys. Mech. Astron. (2)

Y. Liu, X. Yan, J. Wu, B. Zhu, Y. Chen, and X. Chen, Sci. China Phys. Mech. Astron. 64, 234262 (2021).
[Crossref]

Q. Luo, Z. Z. Hao, C. Yang, R. Zhang, D. H. Zheng, S. G. Liu, H. De Liu, F. Bo, Y. F. Kong, G. Q. Zhang, and J. J. Xu, Sci. China Phys. Mech. Astron. 64, 234263 (2021).
[Crossref]

Other (2)

J. Zhou, Y. Liang, Z. Liu, W. Chu, H. Zhang, D. Yin, Z. Fang, R. Wu, J. Zhang, W. Chen, Z. Wang, Y. Zhou, M. Wang, and Y. Cheng, “On-chip integrated waveguide amplifiers on Erbium- doped thin film lithium niobate on insulator,” arXiv:2101.00783 (2021).

B. Pan, J. Hu, Y. Huang, L. Song, J. Wang, P. Chen, L. Liu, and D. Dai, in Asia Communications and Photonics Conference (Optical Society of America, 2020), paper M4D.7.

Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Figures (4)
Fig. 1.
Fig. 1. (a) Czochralski process for Er:LN crystal growth. (b) Ion-slicing process to create Er:LNOI wafer. Insets: Er:LNOI wafer showing green fluorescence (top); ${{\rm{Er}}^{3 +}}$ energy diagram (bottom). (c) Cross-section schematic of the final Er:LNOI rib waveguides. (d) SEM images of a waveguide-coupled Er:LN microring resonator. (e) Simulated electric field profiles ( ${E_x}$ ) of ${{\rm{TE}}_0}$ modes at 980 nm (top) and 1550 nm (bottom).

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Fig. 2.
Fig. 2. (a) Experimental setup for gain characterization. (b) Signal enhancement factor versus signal wavelength. (c) ASE spectrum of the Er:LNOI waveguide. (d) Optical transmission spectrum (blue) and Fano-fit curve (red) of an Er:LNOI microring resonator. (e) Fiber-to-fiber transmission spectrum showing strong Fabry–Perot fringes.

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Fig. 3.
Fig. 3. (a), (b) Measured signal spectra as a function of increasing pump powers measured at (a) 1531.6 nm and (b) 1550 nm. Pump powers: 0, 1 mW, 2 mW, 4.2 mW, 8.6 mW, 16.7 mW, and 21 mW. (c), (d) Net internal gain as a function of pump power at (c) 1531.6 nm and (d) 1550 nm.

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Fig. 4.
Fig. 4. (a) Dependence of net internal gain on signal power. (b) Measured internal conversion efficiency (blue dots) as a function of signal power. Red-dashed line shows the linear trend according to small-signal gain.

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Equations (2)

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α = 2 π N e f f λ 0 Q i ,
η = 100 % × ( P s i g n a l , o n − P s i g n a l , o f f ) / ( P s i g n a l , o n − P s i g n a l , o f f ) P p u m p P p u m p ,

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