Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Effects of pupil discretization and Littrow illumination in the simulation of bright-field defect detection

Not Accessible

Your library or personal account may give you access

Abstract

The simulation of optical defect detection on wafers by microscopy requires several approximations. For the simulation with Fourier modal methods, the number of modes is limited by memory and time consumption. Furthermore, the illumination pupil has to be divided into discrete incidence angles for plane waves. We present a way to save the computation of most of these incidence angles. It works only for certain configurations of grating period and illumination wavelength but is an accurate and robust approximation in these cases. We present sample calculations for one- and two-dimensional periodic structures with defects.

© 2009 Optical Society of America

Full Article  |  PDF Article
More Like This
Analysis of crossed gratings with large periods and small feature sizes by stitching of the electromagnetic field

Florian Hudelist, Andrew J. Waddie, and Mohammad R. Taghizadeh
J. Opt. Soc. Am. A 26(12) 2648-2653 (2009)

Wide-field optical nanoprofilometry using structured illumination

Chun-Chieh Wang, Kuang-Li Lee, and Chau-Hwang Lee
Opt. Lett. 34(22) 3538-3540 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved