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Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si 3 N 4 grated waveguide

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Abstract

We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10nm. Significantly improved sensitivity (down to 33pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.

© 2011 Optical Society of America

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