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High-quality LiTaO3 integrated-optical waveguides and devices fabricated by the annealed-proton-exchange technique

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Abstract

High-quality single-mode LiTaO3 integrated-optical waveguides and devices were fabricated below the Curie temperature by the annealed-proton-exchange technique. The waveguides had a high polarization extinction (51 dB), low propagation loss (<0.25 dB/cm), and low fiber-to-waveguide coupling loss (0.5 dB per junction) at 0.82 μm. The device-measured r33 (29.9 × 10−12 m/V) electro-optic coefficient indicates no change in its value from that of bulk LiTaO3.

© 1988 Optical Society of America

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