Abstract

We have constructed a scanning soft-x-ray microscope that uses a laser-produced plasma as the soft-x-ray source and normal-incidence multilayer-coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 14 nm, has a spatial resolution of 0.5 μm, and has a soft-x-ray photon flux through the focus of 10⁴–10⁵ sec⁻¹ when operated with only 170 mW of average laser power. The microscope is compact; the complete system, including the laser, fits on a single optical table.

© 1989 Optical Society of America

First stage in the development of a soft-x-ray reflection imaging microscope in the Schwarzschild configuration using a soft-x-ray laser at 18.2 nm

D. S. DiCicco, D. Kim, R. Rosser, and S. Suckewer
Opt. Lett. 17(2) 157-159 (1992)

Uniformity of the soft-x-ray emissions from gold foils irradiated by OMEGA laser beams determined by a two-mirror normal-incidence microscope with multilayer coatings

John F. Seely, Glenn E. Holland, Thomas Boehly, Gregory Pien, and David Bradley
Appl. Opt. 37(7) 1140-1145 (1998)

Compact soft x-ray microscope using a gas-discharge light source

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Opt. Lett. 33(20) 2359-2361 (2008)

Soft-x-ray imaging from an ultrashort-pulse laser-produced plasma using a multilayer coated optic

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J. Opt. Soc. Am. B 13(2) 454-458 (1996)

Diffraction-limited soft-x-ray projection imaging using a laser plasma source

D. A. Tichenor, G. D. Kubiak, M. E. Malinowski, R. H. Stulen, S. J. Haney, K. W. Berger, L. A. Brown, R. R. Freeman, W. M. Mansfield, O. R. Wood, D. M. Tennant, J. E. Bjorkholm, A. A. MacDowell, J. Bokor, T. E. Jewell, D. L. White, D. L. Windt, and W. K. Waskiewicz
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