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Hydrogenated amorphous germanium detectors deposited onto channel waveguides

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Abstract

We have fabricated hydrogenated amorphous germanium photodetectors coupled to channel waveguides in glass and lithium niobate substrates. We measured a pulse response duration of 140 psec (FWHM), which is shorter than that of any previously reported photodetectors deposited onto dielectric waveguides. The optical gap, which determines the spectral response characteristics, is approximately 1.2 eV. We have measured a photoconductive gain of 18 in phosphorus-doped detectors.

© 1990 Optical Society of America

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