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Ferroelectric-liquid-crystal/silicon-integrated-circuit spatial light modulator

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Abstract

We present the design and characterization of a spatial light modulator (SLM) comprising a ferroelectric-liquid-crystal light-modulating layer on top of a silicon integrated circuit. Our SLM consists of two electrically addressed arrays on the same integrated-circuit die. The first, a 1 × 128 linear array with a 20-μm center-to-center element spacing, used shift register addressing, while the second, a 64 × 64 square array with 60-μm pitch, used static random access memory addressing. The resulting SLM could be addressed at frame rates of up to 4.5 kHz and gave single-element intensity contrast ratios of 12:1.

© 1990 Optical Society of America

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