Abstract

A GaAs/Al_0.30Ga_0.70As multiple-quantum-well vertical optical modulator has been grown on a GaAs substrate using the metal-organic vapor-phase epitaxy technique. This device was removed from the original substrate and placed on a glass carrier by means of epitaxial lift-off (ELO). Photocurrent measurements before and after the ELO show clear exciton absorption peaks and indicate the development of a Fabry–Perot cavity after ELO due to multiple reflections between the front and back of the ELO film. Transmission measurements show a maximal contrast ratio of 2.9 dB and an insertion loss of 2.8 dB at a wavelength of 831 nm.

© 1991 Optical Society of America

AlGaAs/GaAs/AlGaAs thin-film Fabry–Perot modulator on a glass substrate by using alignable epitaxial lift-off

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