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Atomic-nitrogen production in a radio-frequency plasma source

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Abstract

The first high-resolution study, to our knowledge, of the optical emission from an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The spectroscopic results clearly show that the MPD21 nitrogen-plasma source generates an appreciable flux of nitrogen atoms. This suggests that nitrogen atoms are the plasma species responsible for the successful p-type doping of ZnSe:N and related alloys.

© 1993 Optical Society of America

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