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Dispersive interferometric profilometer

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Abstract

The usual automated interferometric profilometers suffer from phase-unwrapping problems. We discuss a one-dimensional method for the absolute determination of the path difference in interferometers to obtain unique surface profiles with high accuracy.

© 1994 Optical Society of America

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Corrections

J. Schwider and Liang Zhou, "Dispersive interferometric profilometer: erratum," Opt. Lett. 20, 945-945 (1995)
https://opg.optica.org/ol/abstract.cfm?uri=ol-20-8-945

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