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High-repetition-rate high-power femtosecond ArF laser source

J. Ringling, O. Kittelmann, F. Noack, U. Stamm, J. Kleinschmidt, and F. Voss

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Abstract

170-fs, 0.8-μJ optical pulses at 193 nm generated by frequency quadrupling of high-power Ti:sapphire laser pulses are amplified in an ArF gain module. Double-pass amplification at a 400-Hz repetition rate resulted in 290-mW average power with pulse durations of ~ 300 fs.

© 1994 Optical Society of America

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