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Depth of focus and the moment expansion

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Abstract

We introduce the so-called moment expansion of a defocused image as a tool for analyzing and improving the depth of focus in optical imaging. It is shown that a number of previously noted defocus phenomena can be readily derived or explained in terms of moment expansion. Some potential applications of the moment expansion to phase-shifting mask and pupil filter design for optical lithography are also briefly noted.

© 1995 Optical Society of America

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