Abstract

We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-$\mathit{\mu }\mathrm{m}$-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-$\mathit{\mu }\mathrm{m}$-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-$\mathit{\mu }\mathrm{m}$-diameter ring and disk resonators to show the feasibility of such devices.

© 1997 Optical Society of America

Waveguide-coupled octagonal microdisk channel add–drop filters

Chao Li, Ning Ma, and Andrew W. Poon
Opt. Lett. 29(5) 471-473 (2004)

Enhanced linear and nonlinear optical phase response of AlGaAs microring resonators

John E. Heebner, Nick N. Lepeshkin, Aaron Schweinsberg, G. W. Wicks, Robert W. Boyd, Rohit Grover, and P.-T. Ho
Opt. Lett. 29(7) 769-771 (2004)

Surface-roughness-induced contradirectional coupling in ring and disk resonators

Brent E. Little, Juha-Pekka Laine, and Sai T. Chu
Opt. Lett. 22(1) 4-6 (1997)

Increasing the free spectral range of silica waveguide rings for filter applications

Christi K. Madsen and Jian H. Zhao
Opt. Lett. 23(3) 186-188 (1998)

Ultrahigh-quality-factor silicon-on-insulator microring resonator

Jan Niehusmann, Andreas Vörckel, Peter Haring Bolivar, Thorsten Wahlbrink, Wolfgang Henschel, and Heinrich Kurz
Opt. Lett. 29(24) 2861-2863 (2004)