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Waveguide-coupled AlGaAs/GaAs microcavity ring and disk resonators with high finesse and 21.6-nm free spectral range

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Abstract

We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-µm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-µm-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-µm-diameter ring and disk resonators to show the feasibility of such devices.

© 1997 Optical Society of America

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