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Measurement of complex surface deformation by high-speed dynamic phase-stepped digital speckle pattern interferometry

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Abstract

We describe a high-speed digital speckle pattern interferometer incorporating a line-scan camera and a waveguide phase modulator for the measurement of complex deformation (vibration phase and amplitude) at audio acoustic frequencies. Experimental data show continuous phase-stepped recovery of out-of-plane surface deformation in one dimension, obtained at 100 kHz with 2π/20rad 0.02µm displacement resolution, for surface velocities of 3.2 mm s-1.

© 2000 Optical Society of America

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