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Fabrication and evaluation of a freestanding pyroelectric detector made from single-crystal LiNbO3 film

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Abstract

We have packaged a rectangular 3 mm×4 mm, 10µm-thick Z-cut lithium niobate LiNbO3 film produced by crystal ion slicing (CIS) and evaluated its performance as a pyroelectric optical detector. We justify the difficulty of preparing the film by showing that the freestanding detector has much greater sensitivity than the same detector bonded to a substrate. We compare the sensitivity of three CIS-film detectors with that of a detector based on a 230µm-thick LiNbO3 plate and describe the detectors’ spatial uniformity and noise-equivalent power.

© 2000 Optical Society of America

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