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Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

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Abstract

The UV wavelength region is of great interest in absorption spectroscopy, which is employed for chemical analysis, since many organic compounds absorb in only this region. Germanium-doped silica, which is often preferred as the waveguide core material in optical devices for telecommunication, cannot accommodate guidance below 400 nm, owing to the presence of UV-absorbing centers. We show that silicon oxynitride SiOxNy waveguides exhibit very good UV performance. The propagation loss for 24μm-wide SiOxNy waveguides was found to be 1.0 dB/cm in the wavelength range 220–550 nm. The applicability of these waveguides was demonstrated in a biochemical microsystem consisting of multimode buried-channel SiOxNy waveguides that were monolithically integrated with microfluidic channels. Absorption measurements of a β-blocking agent, propranolol, at 212–215 nm were performed. The detection limit was reached at a concentration of 13 μM, with an optical path length of 500 μm (signal/noise ratio, 2).

© 2001 Optical Society of America

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