Abstract
We have developed a 50-W average-power KrF excimer laser with a pulse width of 480 fs by using the method of gated gain amplification at a 200-Hz repetition rate.
© 2001 Optical Society of America
Full Article | PDF ArticleMore Like This
Y. Nabekawa, Y. Kuramoto, T. Sekikawa, and S. Watanabe
Opt. Lett. 22(10) 724-726 (1997)
Q. Fu, F. Seier, S. K. Gayen, and R. R. Alfano
Opt. Lett. 22(10) 712-714 (1997)
D. Yoshitomi, T. Shimizu, T. Sekikawa, and S. Watanabe
Opt. Lett. 27(24) 2170-2172 (2002)