Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Efficient high-order diffraction of extreme-ultraviolet light and soft x-rays by nanostructured volume gratings

Not Accessible

Your library or personal account may give you access

Abstract

We report what is believed to be the first demonstration that volume gratings diffract extreme-ultraviolet light (EUV) or soft x-rays into high orders approximately an order of magnitude more efficiently than predicted by classical thin-grating theory. At the 13-nm wavelength, copolymer grating structures with 200-nm period and aspect ratios of 10:1 achieved diffraction efficiencies of 11.2%, 15.3%, 11.5%, and 9.1% in the orders m of 2, 3, 4, and 5, respectively. In addition, the measured transmission spectra are consistent with electrodynamic calculations by coupled-wave theory. High-order diffraction can now be employed for substantially improved diffractive EUV and x-ray optics, e.g., highly resolving diffractive lenses and large-aperture condensers.

© 2001 Optical Society of America

Full Article  |  PDF Article
More Like This
Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands

Ralf K. Heilmann, Minseung Ahn, Alex Bruccoleri, Chih-Hao Chang, Eric M. Gullikson, Pran Mukherjee, and Mark L. Schattenburg
Appl. Opt. 50(10) 1364-1373 (2011)

Switchable optical element with Bragg mode diffraction

Mykola Kulishov, Sergey Sarkisov, Yuri Boiko, and Pavel Cheben
Opt. Lett. 26(11) 759-761 (2001)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved