Abstract
Alloy–ceramic oxide multilayers of with 3.56-nm period have been made by use of the pulsed-laser deposition technique and characterized by means of grazing-incidence x-ray reflectivity. The interface roughness was found to be only at the two interfaces, and , leading to a peak reflectivity of at the first order. The atomic structure in the two individual layers, and MgO, is found to be amorphous, in agreement with the deposition conditions. These multilayers can be used as mirrors for soft x rays in the angular range 18° to 39°, depending on the actual wavelength of radiation in the water-window region.
© 2001 Optical Society of America
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