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Molybdenum–strontium multilayer mirrors for the 8–12-nm extreme-ultraviolet wavelength region

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Abstract

Mo–Sr multilayer mirrors were successfully deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. Normal-incidence (3.6°) reflectance of 23.0% at 8.8 nm, 40.8% at 9.4 nm, and 48.3% at 10.5 nm were measured before the samples were exposed to air. After exposure, as a result of the reactivity of Sr with oxygen and water vapor, the reflectance of these multilayers decreased rapidly. Attempts to use thin layers of C to passivate the surface of these Mo–Sr multilayers were unsuccessful.

© 2001 Optical Society of America

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