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Normal-incidence reflectance of optimized W/B4C x-ray multilayers in the range 1.4 nm < λ < 2.4 nm

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Abstract

We have fabricated W/B4C multilayers having periods in the range d=0.81.2 nm and measured their soft-x-ray performance near normal incidence in the wavelength range 1.4<λ<2.4 nm. By adjusting the fractional layer thickness of W we have produced structures having interface widths σ0.29 nm (i.e., as determined from normal-incidence reflectometry), thus having optimal soft-x-ray performance. We describe our results and discuss their implications, particularly with regard to the development of short-wavelength normal-incidence x-ray optics.

© 2002 Optical Society of America

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