Abstract

A dual-wavelength parallel interferometer for subnanometer displacement measurement is introduced. A synthetic wavelength is used to subdivide the fringes formed by a single wavelength. An experimental setup that uses a heat-stabilizing dual-wavelength 633-nm He–Ne laser as the light source is established. The primary experimental result shows that a resolution of 0.210 nm over a 350-nm range has been achieved.

© 2002 Optical Society of America

Dual-wavelength interferometric technique with subnanometric resolution

Benyong Chen, Xiaohui Cheng, and Dacheng Li
Appl. Opt. 41(28) 5933-5937 (2002)

Elimination of heterodyne interferometer nonlinearity by carrier phase modulation

Serge Dubovitsky, Oliver P. Lay, and David J. Seidel
Opt. Lett. 27(8) 619-621 (2002)

2π ambiguity-free optical distance measurement with subnanometer precision with a novel phase-crossing low-coherence interferometer

Changhuei Yang, Adam Wax, Ramachandra R. Dasari, and Michael S. Feld
Opt. Lett. 27(2) 77-79 (2002)

Polarization compensation: a passive approach to a reducing heterodyne interferometer nonlinearity

Oliver P. Lay and Serge Dubovitsky
Opt. Lett. 27(10) 797-799 (2002)

Fiber-optic extrinsic Fabry–Perot interferometer sensors with three-wavelength digital phase demodulation

Markus Schmidt and Norbert Fürstenau
Opt. Lett. 24(9) 599-601 (1999)