Abstract

We report a novel digital-deflection programmable micromirror array driven by micromechanical digital-to-analog converters that eliminates the need for electrical digital-to-analog converters for analog displacement control, thus simplifying the driving circuitry and reducing the overall system cost. Furthermore, owing to the bistable and hysteretic characteristics of parallel-plate electrostatic actuators, an array of micromirrors can be controlled by means of row- and column-addressing lines, which drastically reduce the number of routing wires and allow array sizes to increase while they maintain high array quality.

© 2004 Optical Society of America

Digitally controlled fault-tolerant multiwavelength programmable fiber-optic attenuator using a two-dimensional digital micromirror device

Nabeel A. Riza and Sarun Sumriddetchkajorn
Opt. Lett. 24(5) 282-284 (1999)

Coherent micromirror arrays

Kebin Li, Uma Krishnamoorthy, Jonathan P. Heritage, and Olav Solgaard
Opt. Lett. 27(5) 366-368 (2002)

Autostereoscopic three-dimensional display based on a micromirror array

Jun Yan, Stephen T. Kowel, Hyoung J. Cho, Chong H. Ahn, Gregory P. Nordin, and Jeffrey H. Kulick
Appl. Opt. 43(18) 3686-3696 (2004)

Broadband polarization correction with programmable liquid-crystal modulator arrays

M. Akbulut, R. Nelson, A. M. Weiner, P. Cronin, and P. J. Miller
Opt. Lett. 29(10) 1129-1131 (2004)

Real-time full-color three-dimensional display with a micromirror array

Jun Yan, Stephen T. Kowel, Hyoung Jin Cho, and Chong H. Ahn
Opt. Lett. 26(14) 1075-1077 (2001)