Abstract
An experiment was performed on a new gray-scale mask material. The mask material is carbon based and has high attenuation in the deep ultraviolet spectral range. The experiment involves making a gray-scale mask for an axicon. Preliminary results show that gray-scale profiles of accurate transmittance functions can be fabricated. Potentially, the capability at deep ultraviolet wavelengths will allow the fabrication of high-resolution components. The high-attenuation characteristic will allow the production of microscale and mesoscale optics of more phase levels.
© 2004 Optical Society of America
Full Article | PDF ArticleMore Like This
Walter Däschner, Pin Long, Robert Stein, Chuck Wu, and S. H. Lee
Appl. Opt. 36(20) 4675-4680 (1997)
Zhou Zhou and Sing H. Lee
Appl. Opt. 47(17) 3177-3184 (2008)
Michael R. Wang and Heng Su
Appl. Opt. 37(32) 7568-7576 (1998)