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Replica-molded high-Q polymer microresonators

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Abstract

Ultrahigh-Q microtoroids on a chip are applied as replication masters to demonstrate replica-molded high-Q microresonator arrays. Replica Q factors are nearly material loss limited, affirming the integrity of the replication process, and are as high as 5×106, or nearly a factor of 40 greater than previous polymer-based devices. Because the molding process is nondestructive, both the master and the molds can be reused. Additionally, by using a novel optical polymer (Vicast), we demonstrate storage of high-Q microresonators in the mold for weeks, providing a method to preserve the whispering-gallery Q factor.

© 2004 Optical Society of America

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