Abstract
We present analytical equations based on thin-film optics with which to extract the thickness of weakly absorbing films from spectral interference measurements, using only the observed constant interference frequency. It is shown that the assumption of a constant index of refraction for the analysis of interference frequency introduces significant errors into the thickness calculation. Instead, the first derivative of with respect to the energy, , has to be included as well to yield the correct film thickness, even for small values of . The equations presented can be used as constraints in appropriate numerical methods to improve the film thickness iteratively.
© 2004 Optical Society of America
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