Abstract

We present a miniature diaphragm-based Fabry–Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only $\sim 0.32\mathrm{mm}$ in diameter. By choosing different diaphragm thicknesses and effective diameters, we obtain a sensor measurement range from 5 to 10,000 psi $(1\mathrm{psi}=51.72\mathrm{Torr})$ and a frequency response up to 2 MHz. In addition, the sensor’s F-P cavity can be set from micrometers to millimeters with a precision of several nanometers. With the all-silica structure, the sensor is reliable, biocompatible, and immune to electromagnetic interference and has high-temperature sensing capability.

© 2005 Optical Society of America

All-fiber high-sensitivity pressure sensor with SiO₂ diaphragm

Denis Donlagic and Edvard Cibula
Opt. Lett. 30(16) 2071-2073 (2005)

Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm

Wenhui Wang, Nan Wu, Ye Tian, Christopher Niezrecki, and Xingwei Wang
Opt. Express 18(9) 9006-9014 (2010)

Measurement of the frequency response of a diaphragm-based pressure sensor by use of a pulsed excimer laser

Fabin Shen, Juncheng Xu, and Anbo Wang
Opt. Lett. 30(15) 1935-1937 (2005)

All-fused-silica miniature optical fiber tip pressure sensor

Xingwei Wang, Juncheng Xu, Yizheng Zhu, Kristie L. Cooper, and Anbo Wang
Opt. Lett. 31(7) 885-887 (2006)

Miniature fiber-optic pressure sensor with a polymer diaphragm

Edvard Cibula and Denis Ðonlagić
Appl. Opt. 44(14) 2736-2744 (2005)