Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Effect of focal spot size on in-band 13.5 nm extreme ultraviolet emission from laser-produced Sn plasma

Not Accessible

Your library or personal account may give you access

Abstract

The effect of focal spot size on in-band 13.5nm extreme ultraviolet (EUV) emission from laser-produced Sn plasmas was investigated for an EUV lithography light source. Almost constant in-band conversion efficiency from laser to 13.5nm EUV light was noted with focal spot sizes from 60to500μm. This effect may be explained by the opacity of Sn plasmas. Optical interferometry showed that the EUV emission must pass through a longer plasma with higher density when the focal spot is large, and strong reabsorption of EUV light was confirmed by a dip located at 13.5nm in the spectrum.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Mass-limited Sn target irradiated by dual laser pulses for an extreme ultraviolet lithography source

Y. Tao, M. S. Tillack, S. S. Harilal, K. L. Sequoia, R. A. Burdt, and F. Najmabadi
Opt. Lett. 32(10) 1338-1340 (2007)

Intense plasma discharge source at 13.5 nm for extreme-ultraviolet lithography

M. A. Klosner, H. A. Bender, W. T. Silfvast, and J. J. Rocca
Opt. Lett. 22(1) 34-36 (1997)

Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation

Aghapi G. Mordovanakis, Kai-Chung Hou, Yu-Chung Chang, Ming-Yuan Cheng, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas, and Bruno Lafontaine
Opt. Lett. 31(17) 2517-2519 (2006)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved