Abstract
We present results on the fabrication and characterization of ridge waveguides in zinc-substituted lithium niobate. High-quality waveguides were fabricated by a combination of liquid-phase epitaxy and multiple applications of ion-beam enhanced etching. The two major demands on ridge waveguides, a very low side-wall roughness and a rectangle shape with side-wall angles close to 90°, were realized simultaneously by using this technique. Single-mode waveguiding at a wavelength of was demonstrated with attenuation values of .
© 2008 Optical Society of America
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