Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Spectral-purity-enhancing layer for multilayer mirrors

Not Accessible

Your library or personal account may give you access

Abstract

We demonstrate, both theoretically and experimentally, that special spectral-purity-enhancing multilayer mirror systems can be designed and fabricated to substantially reduce the level of out-of-band radiation expected in an extreme ultraviolet lithographic tool. A first proof of principle of applying such spectral-purity-enhancement layers showed reduced out-of-band reflectance by a factor of five, while the in-band reflectance is only 4.5% (absolute) less than for a standard capped multilayer.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
UV spectral filtering by surface structured multilayer mirrors

Qiushi Huang, Daniel Mathijs Paardekooper, Erwin Zoethout, V. V. Medvedev, Robbert van de Kruijs, Jeroen Bosgra, Eric Louis, and Fred Bijkerk
Opt. Lett. 39(5) 1185-1188 (2014)

Extreme ultraviolet multilayer mirror with near-zero IR reflectance

W. A. Soer, P. Gawlitza, M. M. J. W. van Herpen, M. J. J. Jak, S. Braun, P. Muys, and V. Y. Banine
Opt. Lett. 34(23) 3680-3682 (2009)

High efficiency structured EUV multilayer mirror for spectral filtering of long wavelengths

Qiushi Huang, Meint de Boer, Jonathan Barreaux, Robert van der Meer, Eric Louis, and Fred Bijkerk
Opt. Express 22(16) 19365-19374 (2014)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved