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Optical filters fabricated in hybrimer media with soft lithography

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Abstract

Fabrication and characterization of guided-mode resonance filters made by soft lithography are presented. As these resonant elements are highly sensitive to parametric variations, it is important to develop methods for their reliable fabrication. Thus, we provide a fabrication process that is consistent and simple, employing an elastomeric mold and a UV-curable organic–inorganic hybrid material. Measured spectra show 81% reflectance and 8% transmittance at a resonance wavelength of 1538nm. The filter’s linewidth is 4.5nm, and the sideband reflectance is 5%. Experimental and theoretical results are in good agreement.

© 2009 Optical Society of America

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