Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser–plasma EUV source

Not Accessible

Your library or personal account may give you access

Abstract

We report the first (to our knowledge) demonstration of a tabletop, extreme UV (EUV) transmission microscope at 13.8nm wavelength with a spatial (half-pitch) resolution of 69nm. In the experiment, a compact laser–plasma EUV source based on a gas puff target is applied to illuminate an object. A multilayer ellipsoidal mirror is used to focus quasi-monochromatic EUV radiation onto the object, while a Fresnel zone plate objective forms the image. The experiment and the spatial resolution measurements, based on a knife-edge test, are described. The results might be useful for the realization of a compact high-resolution tabletop imaging systems for actinic defect characterization.

© 2010 Optical Society of America

Full Article  |  PDF Article
More Like This
Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood
Opt. Lett. 31(9) 1214-1216 (2006)

A 50nm spatial resolution EUV imaging–resolution dependence on object thickness and illumination bandwidth

Przemyslaw W. Wachulak, Andrzej Bartnik, Henryk Fiedorowicz, and Jerzy Kostecki
Opt. Express 19(10) 9541-9550 (2011)

Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni
Opt. Lett. 34(3) 271-273 (2009)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved