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One-dimensional Wolter optics with a sub-50 nm spatial resolution

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi

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Abstract

We studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror [i.e., one-dimensional (1D) Wolter optics] to realize an achromatic full-field hard x-ray microscopy with a resolution better than 50nm. We report the performance of this 1D Wolter optical system when the mirrors were ultraprecisely figured by elastic emission machining. Experiments to form a demagnified image (demagnification factor of 385) of a 10μm slit were conducted at an x-ray energy of 11.5keV at BL29XUL of SPring-8. The system could form a demagnified image with a resolution better than 50nm over a 12.1μm field.

© 2010 Optical Society of America

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