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Two-dimensional guided mode resonance filters fabricated in a uniform low-index material system

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Abstract

We demonstrate the fabrication, simulation, and experimental results of a buried, homogeneous narrowband spectral filter with a periodic, hexagonal unit cell of air pockets, encapsulated in a fused silica substrate. The leaky waveguide is formed by depositing SiOx on an etched fused silica grating via plasma-enhanced chemical vapor deposition. Design principles of guided mode resonance filters were utilized to achieve a resonance with 60% reflectivity at a wavelength of 1.741μm. The device demonstrates resonance with FWHM of 6nm.

© 2011 Optical Society of America

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