Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios

Not Accessible

Your library or personal account may give you access

Abstract

An optical fiber probe, based on spherical coupling of light energy, is proposed to transform the lateral displacement of a spherical coupler into the deflection of a light energy center, while the light energy is transmitted in the reverse direction. Therefore, the shadowing effect of a microcavity can be eliminated. The probe has a high displacement sensitivity, allowing precision inner-dimension measurements of microstructures with high aspect ratios. Measurements of microholes and fuel injection nozzles indicate that, for a microstructure with an aspect ratio of up to 151, a probing force <1μN, a resolution of up to 0.05μm can be achieved using the proposed probe, which is easy to exchange and low cost.

© 2011 Optical Society of America

Full Article  |  PDF Article
More Like This
Spherical coupling probe for measuring inner dimensions of microstructures

Yuanzheng Chen, Jiwen Cui, and Jiubin Tan
Opt. Express 26(26) 33523-33533 (2018)

Three-dimensional fiber probe based on orthogonal micro focal-length collimation for the measurement of micro parts

Jiwen Cui, Junying Li, Kunpeng Feng, and Jiubin Tan
Opt. Express 23(20) 26386-26398 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved