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Chip-scale fluorescence microscope based on a silo-filter complementary metal-oxide semiconductor image sensor

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Abstract

We demonstrate a silo-filter (SF) complementary metal-oxide semiconductor (CMOS) image sensor for a chip-scale fluorescence microscope. The extruded pixel design with metal walls between neighboring pixels guides fluorescence emission through the thick absorptive filter to the photodiode of a pixel. Our prototype device achieves 13 μm resolution over a wide field of view (4.8mm×4.4mm). We demonstrate bright-field and fluorescence longitudinal imaging of living cells in a compact, low-cost configuration.

© 2013 Optical Society of America

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Supplementary Material (5)

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Media 5: PDF (85206 KB)     

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Equations (1)

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