Abstract
Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between and , and an optical loss of is obtained at . Our pedestal silicon structures show mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.
© 2013 Optical Society of America
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