Abstract

We have experimentally demonstrated a compact, integrated optical hydrogen sensor on a silicon-on-insulator platform. The sensor consists of silicon waveguide coated with a thin palladium film. The sensitivity and response time of the sensor was tested for volumetric hydrogen concentrations ranging from 0% to 4%. The proposed hydrogen sensor shows great potential as a building block for an optical nose capable of simultaneous detection of multiple gases as well as environmental effects such as temperature and humidity.

© 2013 Optical Society of America

Metal single-nanowire plasmonic sensors

Fuxing Gu, Heping Zeng, Limin Tong, and Songlin Zhuang
Opt. Lett. 38(11) 1826-1828 (2013)

Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform

Qing Li, Ali A. Eftekhar, Majid Sodagar, Zhixuan Xia, Amir H. Atabaki, and Ali Adibi
Opt. Express 21(15) 18236-18248 (2013)

An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film

Nebiyu A. Yebo, Petra Lommens, Zeger Hens, and Roel Baets
Opt. Express 18(11) 11859-11866 (2010)

Fiber optic hydrogen sensor based on an etched Bragg grating coated with palladium

L. Coelho, J. M. M. M. de Almeida, J. L. Santos, and D. Viegas
Appl. Opt. 54(35) 10342-10348 (2015)

Long-term stability of capped and buffered palladium-nickel thin films and nanostructures for plasmonic hydrogen sensing applications

Nikolai Strohfeldt, Andreas Tittl, and Harald Giessen
Opt. Mater. Express 3(2) 194-204 (2013)