Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

SU-8 nanoimprint fabrication of wire-grid polarizers using deep-UV interference lithography

Not Accessible

Your library or personal account may give you access

Abstract

We describe a new fabrication method for making wire-grid polarizers for the visible and near-IR based on deep-UV interference lithography, nanoimprint, and glancing angle deposition. We fabricated aluminum wire grids with periods ranging from 375 to 230 nm with heights from 145 to 110 nm, respectively. The measured extinction ratio was as high as 220:1 at 1064 nm. The performance of the polarizer is limited by the roughness and porosity of the Al film and the underlying SU-8 structure. This method allows patterning of wire grids on any substrate material, which makes this an attractive method for fabricating wire-grid micropolarizers in a timely and cost-effective manner.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Wire-grid polarizer sheet in the terahertz region fabricated by nanoimprint technology

Keisuke Takano, Hiroshi Yokoyama, Akira Ichii, Isao Morimoto, and Masanori Hangyo
Opt. Lett. 36(14) 2665-2667 (2011)

Fabrication of a mid-IR wire-grid polarizer by direct imprinting on chalcogenide glass

Itsunari Yamada, Naoto Yamashita, Kunihiko Tani, Toshihiko Einishi, Mitsunori Saito, Kouhei Fukumi, and Junji Nishii
Opt. Lett. 36(19) 3882-3884 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved