Abstract
AlGaAs is a promising material for integrated nonlinear photonics due to its intrinsic high nonlinearity. However, the challenging fabrication of deep etched AlGaAs devices makes it difficult to realize high-performance devices such as low-loss dispersion engineered waveguides and high-quality microring resonators. Here, we report a process to make high-quality AlGaAs-on-insulator (AlGaAsOI) wafers where high confinement waveguides can be realized. Using optimized patterning processes, we fabricated AlGaAsOI waveguides with propagation losses as low as 1 dB/cm and microring resonators with quality factors up to 350,000 at telecom wavelengths. Our demonstration opens new prospects for AlGaAs devices in integrated nonlinear photonics.
© 2016 Optical Society of America
Full Article | PDF ArticleCorrections
26 August 2016: Corrections were made to the captions for Figs. 2, 3, and 6. A correction was made to paragraph 2 of page 3999.
More Like This
Minhao Pu, Luisa Ottaviano, Elizaveta Semenova, and Kresten Yvind
Optica 3(8) 823-826 (2016)
Stuart May, Michael Kues, Matteo Clerici, and Marc Sorel
Opt. Lett. 44(6) 1339-1342 (2019)
Lin Chang, Andreas Boes, Paolo Pintus, Weiqiang Xie, Jon D. Peters, M. J. Kennedy, Warren Jin, Xiao-Wen Guo, Su-Peng Yu, Scott B. Papp, and John E. Bowers
Opt. Lett. 44(16) 4075-4078 (2019)